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Table 5.21-25 Setting of operation of the contact output signal 1 Set value Explanation Default N.O. type N.C. type 5.21 Communication Function HRS Series 5-80 HRX-OM-W032 Chapter 5 Display and Setting of Various Functions Setting/Checking: Selected alarm for contact output signal 1 49. Press the [SEL] key once.

CG1A-Z 1) 2) 3) 4) 5) 6) 7)2 2 2 20 2 1.5 25 3 1.5 32 4 1.5 40 5 1.5 50 3 3 63 4.5 3 80 5 4 100 5 4 P6.1. 9 3 20 25 32 40 50 63 80 100 0.28 0.41 0.66 1.20 2.00 3.40 5.90 9.90 0.11 0.18 0.29 0.52 0.91 1.54 2.71 4.54 (J) R0.35 R0.56 0.91 1.80 3.40 4.90 11.80 16.70 H0.42 H0.65 0.11 0.18 0.29 0.52 0.91 1.54 2.71 4.54 (3) 2-7. 10 2-8. 345 P13, 4 CDG1 P15, 6 <> <> D-G59D-G5PD-K59D-G5BA

Bore Size (mm) 25 32 40 50 63 80 100 Limited warranty and Disclaimer Warning Stroke (mm) 1) The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first(1). Also, the product may have specified durability, running distance or replacement parts.

/ mm mm mm c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D

90 100 [mm] [mm] c 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] INPON 2[mm] j 1[mm] j 100 b 0 [mm/s] AREA ON OFF ON [mm] k INP INP OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] -23- (2 INC a b c d e f g h i j k ABS()/ / INC()// )30[mm] No.0 No.0INC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 INC 100 -10.00

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

Direct input . 70 (4) Normal mode Parameter . 74 (4-1) Parameter group selecting screen . 74 (4-2) Parameter group . 74 (4-3) Parameter setting . 75 (4-3-1) Parameter setting screens and how to set the parameter 75 (5) Normal mode Test . 76 (5-1) Test selection screen . 76 (5-2) Test items . 76 (5-3) Test details . 76 (5-3-1) JOG/MOVE . 76 (5-3-2) Return to origin . 78 (5-3-3) Test drive . 80

Monitor 1 Drive Output Input SET 80 - AX IS. OUT mon 1 ID BUSY [ ] SVRE [ ] OFF SETON [ ] ON No.No. AX IS. OUT mon 1 ID Serial No. 0 Type No. (6-3-2-2) TB Ver.511 Output BUSY I/O keykey SVRE I/O SETON INP AREA WAREA ESTOP ALARM JOGJOG+ MODE WREND Serial No. TB Ver1.: Type No.

(Example) Step data "force" is 100% Step data "Trigger LV" is 80% The energy saving setting of the electric actuator is 40% force (%) INP (ON) The actuator model determines the energy settings.

Pushing force INP output [ON] (%) 100 80 Tligger LV Energy saving mode 40 Time When the actuator is within the output range between Area1 and Area2 in the step data, this terminal will turned ON.

Please refer to the manual of the actuator for more details. 0 Pushing force INP (ON) (%) 100 Trigger LV 80 Energy saving mode 40 Time When the actuator is within the output range between Area1 and Area2 in the step data, this signal will turn ON.

(Example) Step data force is 100% B10 INP INP (ON) force 100 80 Step data Trigger LV is 80%, The energy saving setting of the electric actuator is 40% 40 The electric actuator model determines the energy settings.Please refer to the specifications of the electric actuator for more details.

Pushing force 1 0 to 30 10% RWwn+6 Trigger LV 1 0 to 30 10% Pushing speed 1 0 to 255 mm/s RWwn+7 Positioning thrust 1 0 to 30 10% H RWwn+8 L In pos 2 0 to 65500 0.01mm ID2 RW+9 to 17 Same as ID1 ID3 RWrn+18 to 26 Same as ID1 ID4 RWrn+27 to 35 Same as ID1 ID5 RWrn+36 to 44 Same as ID1 ID6 RWrn+45 to 53 Same as ID1 ID7 RWrn+54 to 62 Same as ID1 ID8 RWrn+63 to 71 Same as ID1 ID9 RWrn+72 to 80

+/-2147483647 0.01mm 4 1 5 0 6 H Current speed 2 0 to 65500 mm/s 7 L 8 H Current Force 2 0 to 300 % 9 L Numerical data 10 3 input ID1 Target 11 2 position 4 +/-2147483647 0.01mm 12 1 13 0 14 Alarm 0 to 255 15 Alarm 0 to 255 4 16 Alarm 0 to 255 17 Alarm 0 to 255 18 19 Controller IF status flag (ID=1) All modes ID2 20 to 39 Same as ID1 ID3 40 to 59 Same as ID1 ID4 60 to 79 Same as ID1 ID5 80

ID 14 Alarm 0 to 255 15 Alarm 0 to 255 Numerical data 4 input 16 Alarm 0 to 255 ID1 17 Alarm 0 to 255 18 19 Controller IF status flag(ID=1) All modes ID2 20 to 39 Same as ID1 ID3 40 to 59 Same as ID1 ID4 60 to 79 Same as ID1 ID5 80 to 99 Same as ID1 ID6 100 to 119 Same as ID1 ID7 120 to 139 Same as ID1 ID8 140 to 159 Same as ID1 ID9 160 to 179 Same as ID1 ID10 180 to 199 Same as ID1 ID11

67 125 304 33 73 31 36 154 21 330 231 15 IDFA4E to 11E B A D E Q SWITCH WITH LAMP AIR INLET THERMOMETER EVAPORATION AIR OUTLET G F C DRAFT AIR OUTLET VENTILATION VENTILATION (O.D.10 LENGTH:0.8m) DRAIN TUBE TERMINAL BLOCK (820) J K L H 4-13 P M N POWER SUPPLY ENTRY(17) GROMMET Measuremm Model Thread Size A B C D E F G H J K L M N P Q IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 Rc3/4 270 80

Using this product at high temperatures (40 to 80 oC) may cause burns. Do not touch the surface until it is cooled down to less than 40oC. Connect IN and OUT correctly. (Make sure that reverse flow will not be generated) Make sure that back flow will not be generated. The element might break due to exposure to back flow.

VXF21A VXF22A VXF23A VXF24A VXF27B VXF28B VXF25(A,B) VXF26(A,B, C,D) Product number Orifice size mm 22 28 44 53 70 80 90 100 Air Fluid Minimum operating pressure Maximum operating pressure MPa 0.03 0.1 MPa 0.7 Fluid temperature -10 (Non-freezing) to 60 Ambient temperature -10 to 60 Coil insulation type Class B Enclosure IP65 Alloable voltage fiuctuation 10% of rated voltage AC VA 10 7

Reference data Units: mm IDH6 Jumper cord 7 6 5 4 3 1 PE Remote start/stop Fault-signal (N.O: Close at "Fault") Fault-signal (N.C: Open at "Fault") 1042 31 N 2 L Operation-signal (N.O) Ground Terminal screw: M3 Suitable wire: 1.25mm or more 2 244 Power supply Connector width: 6.5mm or less Detail of wiring 35 184 172 392 (Note) 15 80 223 321 3001 485 The type without built-in filter does

IDG100LA IDG60SA IDG75SA IDG100SA Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 224 308 400 75 140 230 Outlet air flow rate L/min(ANR) 170 240 300 50 100 150 Purge air flow rate L/min(ANR) 54 68 100 25 40 80