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D.IN1 SEL No.7 screen Contact input signal 1 type ALT ALT/MT D.IN1 SW TYPE No.8 screen Contact input signal 1 operation A A/B D.IN1 CON TYPE No.9 screen Contact input signal 2 function OFF OFF/STOP/SW D.IN2 SEL No.10 screen Contact input signal 2 type ALT ALT/MT D.IN2 SW TYPE No.11 screen Contact input signal 2 operation A A/B D.IN2 CON TYPE No.12 screen Contact output signal 1

OUT mon 1 HOLD [ ] SVON [ ] OFF DRIVE [ ] ON [] [ ] (6-3-3-2) Input I/O HOLD keykey SVON I/O DRIVE RESET SETUP JOGJOG+ FLGTH MODE WRST Brake SW Origin SW SW-FF Limit SW-F SW-RR Limit SW-R EMS B Enable SW EMS EMS EMS 82 - (6-3-4) (6-3-4-1) Output pinSET AX IS. Monitor 1 Output Input Output pin SET AX IS.

Ions are emitted from ionizer to detect the timing for emitter maintenance timing, and the workpiece Output Output Static neutralization complete signal Static neutralization complete signal 2 sec or less 2 sec or less OFF OFF (SW ON) 100ms or more (SW ON) 100ms ON ON or more Input Maintenance detection signal Maintenance detection signal Input OFF OFF (SW ON) (SW ON) ON ON Output Output

Width across flats SW WB WA WB WA KK D D e e d d KK 2 x 4 x RT L9 VD BG A L12 BG VD G f A L12 l 2 x h + L8 + 2 x Stroke L8 + Stroke h + Stroke l + Stroke f G h Bore size [mm] Stroke range [mm] A D EE PL RT L12 KK SW G BG L8 VD WA WB E R L9 SL 32 Up to 1000 22 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 47 32.5 4 8 40 Up to 1000 24 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105

(Close the cover after changing SW) u i e Cover o !

Width across flats SW KK B D D B R E KK WB WA VD L12 VD L9 2 x 4 x RT L2 BG E R L12 ZY + 2 x Stroke L8 + Stroke H H + Stroke A G G WH A L2 BG WH + Stroke With rod boot at one end e d f l h h + L8 + H + 2 x Stroke Stroke range*1 [mm] A B d11 BG D E EE G H KK L2 L8 L9 L12 PL R RT SL SW VD WA WB WH ZY Bore size [mm] 32 Up to 1000 22 30 16 12 47 G 1/8 28.9 48 M10 x 1.25 15 94 4 6 13 32.5 M6

ON) (SW ON) 100 ms or more Reduced-wiring Fieldbus System Input Input Maintenance detection signal (OUT2) Maintenance detection signal (OUT2) ON OFF ON OFF (SW ON) (SW ON) Output Output Flash Maintenance detection indicator Maintenance detection indicator Flash (Indication) ON OFF ON OFF (Indication) LED LED (NDL CHECK ALARM) (NDL CHECK ALARM) Maintenance detection Maintenance detection

PL 2 x EE PL KK SW KK WB WA B D D B 8 x RT L9 VD BG L2 L12 A WH G H ZY + 2 x Stroke L12 VD L2 Cushion valve G WH + Stroke A H + Stroke L8 + Stroke With rod boot at one end d e f l h h + L8 + H + 2 x Stroke With rod boot at both ends d d e e L8 + Stroke h f l l + Stroke f 2 x h + L8 + 2 x Stroke h + Stroke A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY Bore size (mm) Stroke range (mm

[SW] ORIG mode 12 ORIG limit *1 ORIG time ORIG speed *1 ORIG ACC/DEC *1 Creep speed 0. [] 1. a [a ] 2. b [b ] ORIG sensor 02 ORIG SW DIR SW 21 21 UndefineNo.21 *1 52 - 11.4 JOG () JOG JOG *1 JOG (1mm/s) JOG JOG 1 JOG (1mm/s 2) JOG JOG 1 JOG (1mm/s 2) JOG JOG *1 JOG (1%) + (0.01mm) *1 *2 3:++ 53 - 12. 12.1 () () M (2 ) (1 ) 12.2 *0 () /() M 54

VBA VE VY1 SW round head Phillips screws G M3 x 8 Panel PPA Gasket A AL Display protective cover Tighten screws by 1/4 to 1/2 turn after the heads are flush with the panel. 14-8-41

HW/SW SW 1 Set the address and speed over the DeviceNet network. (Switch setting is invalid) : Refer to Setting over the DeviceNet network section for the setting method through the network.

Before Use Fieldbus device EX250-SPR1 SW power is supplied to the sensor connected to the input block. There is a voltage drop up to maximum 1 V inside the SI unit when SW power is supplied. Select a sensor taking this voltage drop into consideration.

0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

) LEC LED CN2 SW CN2STAT BUS STAT CN3() ON EtherNet/IP CN2(TB/PC ) OFF *(CN2 SW)ON 4.3LEC LEC GW LEC LEC LEC GW GW LEC 1 112 ID [] 5 (LEC-T1) (115.2kbps) 3 (LEC-W2) (38.4kbps) 6 [] (230.4kbps) (LEC-W2) *-5(115.2kbps) * GW (CN2SW) 16 - (1)-ID (LEC-W2) 1)LEC Normal [Parameter] -ID [1]ID [2] ID LEC 2)LEC LEC ID (LEC-T1-) 1)LEC SET SET (TB =) 1 1 2)ID SET 1 [1]ID

SW/HW mode setting CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: SW/HW No.10 Description Setting for MAC ID and baud rate are done via a network. : No.1 to No.8 of DIP SW will be invalid.

Function (+) Sensor power supply Description 2 1 SW + Open 2 N.C. 1 Description No.

HW/SW SW 1 Address/communication speed is set via the network. The function of the switches No.1 to 8 will become invalid. : Refer to "Network setting" for the setting method via the network.

Refer to page 30 for detail. -21No.EX-OMI0032-G HW/SW mode setting (Switch No.10) The setting is as follows. The setting at shipment is turned OFF, set to HW mode. Mode No.10 Function HW OFF Set Address with No.1 to 7 (SW1). Addresses are set by network. Class 2 master is required for the setting via network. It is set at 126 when delivery. SW ON : No.1 to 7 (SW1) are ignored.

The seal sw elled, and the supply/exhaust poppet valve does not sw itch. (4) The supply poppet valve is damaged. The supply side return spring is broken. The set pressure fluctuates even though the equipment on the dow nstream side is not operated. (7) The supply pressure fluctuates. (8) The pilot pressure fluctuates. The pilot valve does not sw itch.