Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 23 23 30 30 42 42 50 8.5 11 12 15 18 23 28 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 442 Series

Hygienic Design Cylinder Series HY

Note 2) Contact SMC for HYQ 20, 25. 887 Options Rod End Nut Plug Bolt Series HYQ, HYC Series HYC Series HYB, HYG d M BM BM M C B2 BZ BZ B2 B H Material: Stainless steel (mm) Material: Stainless steel (mm) Material: Stainless steel (mm) HYB d C B H 20 25 32 40 50, 63 B2 BM 32, 40 50, 63 10 12 M BZ 22 24 6 8 B2 M BZ BM 20 25 32 40 50 63 80 100 Applicable bore size Part no.

RZQ

size (mm) A LH LS B L LD LG 32 30 107.7 82.5 18 6.6 4 66.5 Special cap bolt 40 33 92 76 117.2 18 6.6 4 50 39 96.5 73.5 126.7 22 9 5 LY RE A B 63 46 102 76 138.2 28 11 5 LH REC Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke LG CX LZ LX 4-LD 32 57 57 71 11.2 5.8 A + Full stroke 40 64 64 78 11.2 7 CY 50 79 78 95 14.7 8 63 95 113 16.2 9 91.5 MQQ M Courtesy of Steven Engineering, Inc.-230

Magnet Gripper Unit for Collaborative Robots

Operating environment .28 5-7. Lubrication .28 6. Maintenance or inspection .28 6-1. Maintenance or inspection .28 6-2. Replacement part .29 6-3. Maintenance .29 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

Recommended tightening torque Unit: N m Thread size 18 14 38 12 34 1 1 1/4 1 1/2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 (4) Do not apply a spanner to the pressure switch body during piping. Otherwise, the product may be damaged. (5) Do not apply torsion or bending moment other than the weight of the product itself.

VDW

PAX PB Lined Up by Compact Design 28 2 Port 3 Port 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 17-2-61 2 Series VDW Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions.

Compact Guide Cylinder Series MGQ

30 51 55 70 71 25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Compressed Air Preparation Filter

Recommended Torque Unit: Nm AFF20 AM20 AMD20 AMK20 AFF50/AFF60 AM50/AM60 AMD50/AMD60 AMK50/AMK60 AFF30 AM30 AMD30 AMK30 AFF40 AM40 AMD40 AMK40 Connection thread 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Applicable model 4. When an SMC One-touch fitting is used, refer to the operation manual for the One-touch fitting.

CLQ

For details, refer to page 9-15-39. 9-10-28

CHKD/CHKG

with SMC. 265 A CHKD Series Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 10 3.5 7 314 3140 1099 2198 OUT 20 12 201 2010 704 1407 IN 490 4900 1715 3430 OUT 25 14 336 3360 1176 2352 IN 804 8040 2814 5628 OUT 32 18 549 5490 1922 3843 IN 1256 12560 4396 8792 OUT 40 22.4 862 8620 3017 6034 IN 1963 19630 6871 13741 OUT 50 28

Compact Cylinder with Lock Series CLQ

40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Series 10-, 21- AF-A Air Filter

Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A 142.1 174.1 176.1 247.1 261.1 93.9 122.1 154.1 156.1 227.1 241.1 91.4 28

3 Way Direct Acting NVKF 300 Series

160) 7.O4 079) 7.A 8.54 (198) (2r7) (2361 10.04 (25s) 10.79 1274't 11.54 12.28 (293) (312) 13.03 (331) 13.78 14.53 {3s0) L (369) 15.24 $mhs lllUlff 300 0l|||m$io Base Mounted (Side Ported) lType 42 Manifold NVV3KF3-42-Stations-01 T inch (mm) L: Dimensions Base Mounted (Side Ported) lType 542 Manifold NVV3KF3-S42-Stations-01 T inch (mm) L: Dimensions ni Stations L1 (38) 14.57 (370) 1 . 1 (28

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28

PSE575_6_7_eng

PSE57 -28 Current output: 4 to 20 mA Allowable load impedance: 500 or less (at 24 VDC) 100 or less (at 12 VDC) Caution After maintenance is complete, perform appropriate functional inspections and leak tests. Stop operation if the equipment does not function properly or there is a leakage of fluid. When leakage occurs from parts other than the piping, the product might be faulty.

CE

016 122032 405063 12 20 3263 2 1 0.8 JIS B0209 3-2 76 *1 23 14.5mT DC12VDC24V(10) 1 40mA 0.1mmCEU5 *2 (20) 0.2mm Max DC24V,40mA A /B DC500V50M12E 33.3Hz 6.8G X,Y 2 Z 4 JIS D1601 30G X,Y,Z 3 *3 IP-65(IEC60529 *1)SMC CEU5 *2)CEU5 *3) 3-3 3-3-1 J mm 12 20 32 40 50 63 E 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 g (mm) mm 25 50 75 100 125 150 175 200 250 300 400 500 12 28

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13