Counter/Extension Cable W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.
Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.
VXF21A VXF22A VXF23A VXF24A VXF27B VXF28B VXF25(A,B) VXF26(A,B, C,D) Product number Orifice size mm 22 28 44 53 70 80 90 100 Air Fluid Minimum operating pressure Maximum operating pressure MPa 0.03 0.1 MPa 0.7 Fluid temperature -10 (Non-freezing) to 60 Ambient temperature -10 to 60 Coil insulation type Class B Enclosure IP65 Alloable voltage fiuctuation 10% of rated voltage AC VA 10 7
Vacuum/ReleaseInstruction Table 4-10.
position Pin 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Input signal Pin 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Input signal assignment (EX600-DX E ) Configuration Pin number 1 2 3 4 5 6 7 8 Signal name Input 0 Input 2 Input 4 Input 6 Input 8 Input 10 Input 12 Input 14 Input signal Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Pin number 14 15 16 17 18 19 20 21
[I/O cable] PLC Controller I/O cable LATH2 1 PLC side Controller side Cable length (L) 1 3 5 (10) L 1 m A1 (Red) 3 m 5 m (18.6) Conductor size: AWG28 (6) A C B (15.4) Parallel I/O Plug Terminal List Polarized key A1 (Red) Fused Fused (10) Terminal no. Terminal no.
H:Distance from the cylinder center axis to the mounting surface for the table L MXY H dimension (mm) MXH6 MXH10 MXH16 MXH20 MTS 24.5 30.5 34.5 41.5 Cylinder shaft center m Load center of gravity Selection Graph z to c (Vertical Mounting) Graph c c Maximum Speed 500 mm/s or Less Graph z z Maximum Speed 100 mm/s or Less 1 100 10 Mass m (kg) Mass m (kg) 20 0.1 16 20 16 1 10 10 6 6 0.01 0.1
10 0.3 MP 0.3 MPa 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MP 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0 10 20 30 40 50 60 70 0 20 40 60 80 100 120 0 20 40 60 80 100 120 10 20 30 40 50 60 70 0 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-25D1 2 MHL2-20D1 2 MHL2-20D MHL2-25D 200
Filtration accuracy (m) 5 10 20 40 74 105 No.
MPa 5.0 MPa Rated pressure range 2.0 MPa 1.0 MPa 1.6 MPa 1.0 MPa Withstand pressure 1.5 MPa 2.4 MPa 3.0 MPa 5.0 MPa 12.5 MPa 30 MPa Power supply voltage When used as a switch output device 12 to 24 VDC 10% with 10% voltage ripple or less When used as an IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Temperature characteristics 2% F.S. (25C standard) 3% F .S.
Fittings & Tubing Air Cylinders Rotary Actuators Suction flow rate L/min (ANR) Size 10/16 20/25 10 to 60C 0.01 180 c.p.m.
type snap ring for hole Piston y Nickel plated (15) (10, 25) Electroless nickel plated (10, 15) (Only for 25) Piston nut u i C type snap ring for shaft Snap ring @9 Shaft Zinc chromated (15, 25) Zinc chromated (10) Zinc chromated (15, 25) Zinc chromated (10) #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 Rolled steel plate Piston side yoke o Chrome molybdenum steel Hexagon socket head set screw Nickel
type snap ring for hole Piston y Nickel plated (15) (10, 25) Electroless nickel plated (10, 15) (Only for 25) Piston nut u i C type snap ring for shaft Snap ring @9 Shaft Zinc chromated (15, 25) Zinc chromated (10) Zinc chromated (15, 25) Zinc chromated (10) #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 Rolled steel plate Piston side yoke o Chrome molybdenum steel Hexagon socket head set screw Nickel
. 8-1 8.1 . 8-1 8.2 . 8-1 9 L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2
Single Piston Actuator size Recommended model Piping condition Bore size (mm) Stroke (mm) Tube O.D. 2 mm IDK02-100 IDK02-200 Tube O.D. 4 mm IDK04-100 IDK04-200 Tube O.D. 6 mm IDK06-100 IDK06-200 Tube length (m) 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 2.5 All strokes 4 All strokes Less than 10 6 10 or more Less than 10 8 10 or more Less than 10 10 10 or more Less than 10
Manual unlocking P14 10. Maintenance P16 10-1. Disassembly/ Replacement 10-2. Maintenance 10-3. Construction 11. Auto switch P19 11-1. Applicable auto switches 11-2. Minimum auto switch mounting stroke 11-3. Auto switch proper mounting position (detection at stroke end) and its mounting height 11-4. Auto switch operating range 11-5.
(N.C. type) B, D (N.O. type) E (Double acting) VX2 Air/Inert gas Fluid Specifications 10 to 60C (No freezing) Fluid temperature Piping size Symbol Passage VXD A B C D E N.C. 1/4" fitting integrated type 10 to 60C (No freezing) Ambient temperature N.O. 1/4" fitting integrated type 0 to 22.0 MPa 0 to 20.0 MPa Operating pressure range VXZ Flange type N.C. 35.0 MPa Proof pressure Flange type
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
D-A9V D-M9V 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 1 pc. D-Z7 D-Z80 10 5 2 pcs. 15 10 1 pc. D-Y59 D-Y7P 10 5 2 pcs. 15 10 1 pc. D-Y69 D-Y7PV 5 2 pcs. 5 1 pc.