INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Residual pressure relief 3 port solenoid valve Applicable air combination Spacer Spacer with bracket Piping adapter Silencer wAC30-A Air filter + Mist separator + Regulator (AF30-A) (AFM30-A) (AR30-A) VP517 AC25-A, AC30-A Y300-A Y300T-A E300-03-A AN30-03 AN302-03 *1 Connection threads are not available for the residual pressure relief 3 port solenoid valve.

XLJ- -*G1 Series 25 40

Note 2) A voltage symbol (same as How to Order) is entered into the mark * 5 XL-OMU0002-A 3.

Setting software for e-Actuator (e-Actuator setup tool)

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Input block

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

High Vacuum Slit Valve

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

ITV_P-E

When a current of approx.150 mA or more is applied, the over current circuit will operate, Er.5 will be displayed and the operation will stop. 1Brown 1Brown Power supply Power supply DC24V+/-10% DC24V+/-10% 2White 2White 3Blue 3Blue Load Load 4Black 4Black Please install a load to give an output current of 80 mA or less.

EX245-FPS1_2_3_eng

For other applications a SELV or PELV DC power supply should be used. US2 [US3, US4 .. etc] is not present or is below the dropout level (< approx. 17 VDC). Loop through current between power connector 16 A or less (EX245-FPS1/2) 10 A or less (EX245-FPS3) OFF 3 2 US2 [US3, US4 .. etc] is below the permissible level but above the dropout level (17 to 21.6 VDC).

8

VCR is a registered trademark of Swagelok Marketing Co. Ripple A small AC voltage superimposed on top of DC voltage. In the case of Fig. (3), ripple 10% means V' V" V'/V x 100 = 10% When no pulsation has occurred, ripple is 0%.

ITV2-OM0095

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

VN-OMJ0001

() 5 VN*-OMJ0001-B VNB VNB VNB VNB Series Series Series Series 1 DC AC VT307 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 2 4 4 VNB0 VNB02 VNB03 VNB1 12 () (P1) (P2) () 10 ()12(P1) 10(P2) 2 VNB01V VNB02V VNB1 V 12 (P1) 10 (P2) VNB 1V (N.C.) 0 6 VN*-OMJ0001-B () P2 O O 7 VN*-OMJ0001-B No. 1 2 3 4 5 6 7 8 9 10 11 P2N.C.

MH-OMY0004

MH-G04(30g) 10 2 16 3 20 4 25 5 19 3-5. / / / 10 16 20 25 20 1 10: 2 1625: 1625: 3 4 5 6 7 8 A 9 B 10 11 12 13 14 15 C 16 MHY2-10D MHY2-16D MHY2-20D MHY2-25D 17 18 MHY10-PS MHY16-PS MHY20-PS MHY25-PS 19 20 21 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Note) M1 Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

PSE57  Series Pressure Sensor for General Fluids

Temperature characteristics (25C reference) 2%F.S. (0 to 50C) 3%F.S. (10 to 60C) 3% F.S. (0 to 50C) 4% F.S. (10 to 60C) 5% F.S. (10 to 60C) Accuracy Enclosure IP65 Withstand voltage 500 VAC for 1 minute between terminals and housing Insulation resistance 100 M or more (500 VDC measured via megohmmeter) between terminals and housing Operating temperature range Operating: 10 to 60C, Stored:

CH

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

Air cylinder 40, 50, 63 10-/1121-/22Series CA2 How to Order Clean series 10 11 Relief type Vacuum suction type Mounting style Basic style Axial foot style Rod side flange style Head side flange style B L F G Bore size (mm) Port thread type Rc NPT G Nil TN TF 10 C D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc. "n" pcs.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6

Clean Room Regulator/Fluoro Resin Type Series SRF30

to change a tube size by replacing an insert bush nut.