Rotary Cylinder Series MRQ

(Position lock) Nabeya Bi-tech Kaisha (Clamp lock) Adjusting angle per 1 rotation of angle adjusting screw 5.7 4.8 MA12 x 26 PSL-K-12 CLH-12 x 18 MA14 x 28 PSL-K-14 CLH-14 x 23 Please consult with manufacturers concerning further information on specifications. Precautions Backlash The rotary motion part has a structure that does not generate backlash.

IZx-OMT0049

Note 11) If ON is selected for key lock setting, the setting is held even if the power is turned off and on again. 3)When error occurs CPU failure CPU failure Power supply failure (High voltage power supply Incorrect high voltage Communication error (controller) module) Error codeE1 Error codeE3 Error codeE4 Error codeE0 Error codeE2 Display Status Note 12) Note 12) Note 12) Note 12) Power

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

energy saving effect

HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 8% to +10% 12 VDC: 6% to +10% Select the DC standard type or the power saving circuit type when the valve is continuously energized for long periods of time.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material Body Cap 1 2 3 4 5 6 7 8 12 Aluminum alloy Rolled steel Steel wire Stainless steel Zinc alloy Steel wire Zinc alloy Aluminum alloy NBR Cross-recessed head cap screw E type snap ring Handle Ring Lock nut Needle O-ring Replacement Parts No. Description Material Parts no.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 D2 L2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

ASN Flow Rate and Sonic Conductance AQ ASV AS1001F AS2001F AS3001F AS2051F AS4001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Series MXP/MXPJ6 11226, 10, 12, 16 Air Slide Table How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicone-free + Low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke (mm) Auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table below

VK3000

(Values at the initial period) Dustproof VZS VFS VS4 VQ7 Solenoid Specifications EVS Base mounted Grommet (G), DIN terminal (D) 100, 110, 200, 220, 240 6, 12, 24, 48 10% of rated voltage 9.5 VA/50 Hz, 8 VA/60 Hz 7 VA/50 Hz, 5 VA/60 Hz Electrical entry VFN AC DC Rated voltage (V) Allowable voltage fluctuation Inrush Holding Apparent power (AC) Body ported Diode (12 VDC or less: Varistor) Varistor

WRF100

15 60 108 15 80 600.05 +0.015 0 2 x 8H7( ) depth 12 (2 x 4 x M5 x 0.8 through) For limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1/ 4 Unclamp side port 306 (30.2) (30.2) 360

In-line Air Filter

(Upper/Metric, Lower/Inch) Series Filtration area [mm2] IN side > OUT side 2 3.2 4 6 8 10 12 IN side OUT side Applicable tubing O.D.

ZSE30A(F)/ISE30A

OUT2 White OUT2 12 to 24 VDC 12 to 24 VDC FUNC FUNC U Blue DC () Blue DC () -E PNP (1 output) + Analog voltage output -F PNP (1 output) + Analog current output Brown DC (+) Brown DC (+) Black OUT1 Black OUT1 + + White OUT2 White OUT2 12 to 24 VDC 12 to 24 VDC Load Load FUNC FUNC U Blue DC () Blue DC () The FUNC terminal is connected when using the copy function.

ZSM1-115/121

ZSE ISE ZSP Fig. (2) Equivalent circuit of an NPN switch with the output off PS PLC Low level 12 to 24 [VDC] Main circuit of switch ISA Max. 80 [mA] Max. 30 [V] Load PSE Current flows. Load is powered. IS ISG Fig. (3) Equivalent circuit of an NPN switch with the output on ZSM PNP 12 to 24 [VDC] Fig. (4) shows an example of a PNP switch.

Ejector Valve Unit Series ZYY/ZYX

Brown DC (+) ZF (OUT1) Black + Covering retainer Core wire crimping area Load ZP 12 to 24 VDC 80mA Core wire Lead wire Socket Blue DC () SP Hook Covering 3.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

EXxx-OMW0014CN

. 12.1. . 12-1 . 12-1 EX245-EA2-1 . 11-1 EX245-SPN1A/SPN2A/SPN3A n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6(8 ) mm 80 No.EX-OMW0014CN-A 13. 13.1.

Digital Flow Switch (Remote type monitor unit)

min (250 L type) [ P_2] Set value (OUT2) [F 2]/[ oUt2] Page 37 5% of max. rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_2] Hysteresis (OUT2) [F 3]/[ RES] [ rES] Response time setting [ 1 .00] 1 second Page 41 [F10]/[ SUb] [ SUb] Selection of sub screen [ oUt] Display of set value