13-MXS clean room air slide tables, rated for contamination grade 3, are great for applications that call for precise movement ranging from 10-150mm typically requiring a cylinder and precision guide. The MXS is available in 6 bore sizes, each with set stroke lengths and is standard with auto-switch capability.

Lateral vacuum inlet with buffer; Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16; Flat, flat with groove, bellows type pads; Buffer stroke: 3mm, 6mm, 10mm, 15mm, 20mm

Type: Retainer Pin/Stopper Set, Cover: N/A, Element Material: [Resin Base] Sound Absorbing Resin, Main Body Material 1: [Resin] Resin, Flow Coefficient (Cv)(mm2): 13, Silencing Effect(dB): 38, Pipe Connection Port Type: One-Touch Pipe, Mounting Thread Nominal: -, One-Touch Fitting Size: φ8, Outer Diameter D(φ): 22, Effective Sectional Area Class(mm²): Up to 15, Recommended Flow

Type: Retainer Pin/Stopper Set, Cover: N/A, Element Material: [Resin Base] Sound Absorbing Resin, Main Body Material 1: [Resin] Resin, Flow Coefficient (Cv)(mm2): 20, Silencing Effect(dB): 30, Pipe Connection Port Type: One-Touch Pipe, One-Touch Fitting Size: φ8, Outer Diameter D(φ): 13, Effective Sectional Area Class(mm²): Up to 20, Recommended Flow Rate(m3/min(ANR)): 3.0 or less

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: Rc1/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: Rc1/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: [Others] NPT1/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: 1/8-27 NPT, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C

Provided, Ultimate Vacuum(kPa): -48, Air Consumption Flow Rate(l/min): 14, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C): -5～50, Suction Flow(l/min): 13

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/4, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 13, Voltage: 24 V DC, Sealing materials: NBR, Option: 2

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/4, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 13, Voltage: 24 V DC, Sealing materials: NBR, Option: 2

Resistant / Heat Resistant, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 13, Vacuum entry port thread diameter: M5, Buffer specifications: With whirl-stop, Buffer stroke(mm): 6, Mounting connection screw: Female thread M5 × 0.8, Type: With buffer, Vacuum outlet direction: Vertical direction, Barbed fitting tube diameter(ø): -

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number), DIN

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Male Thread ZPT Series

Symbol 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry port 32 32 40 B5 M5 x 0.8 40 50 50 Material NBR N Pad type Silicone rubber S Ball joint type F Urethane rubber U FKM F Conductive NBR GN Conductive silicone rubber GS Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

Type: 10S (Side Ported), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: L8 (ø8 One-touch Fitting, Upward Elbow), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate),

(The optional gasket part number is “CAXT623-6-7-13.”)