Piping: Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: 5/16" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 1/4" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 5/16" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 10 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 11 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 11 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 12 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 20 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

M-E05-1-LQ1

Metric size Inch size 3 4 6 8 10 12 19 25 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Type Body class Seat Applicable tubing size Body class Metric size 1, 2 03 (3) 5, 6 19 (19) 6 25 (25) 1 Note) 03 04 Note) 03 Tubing O.D.

HEC-OM-S008

0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

VFRA3000

VV5FRA3-10-061-03 1 pc. VFRA3111 5 pcs. VVFS3000-10A 1 pc.

VFRA3000

EX) VV5FRA4-10-061-03 1 pc. VFRA4111 5 pcs. VVFS4000-10A 1 pc. 3.2-23 VFRA4000 Dimensions 2 position single: VFRA4111-03 04 2 position double: VFRA421103 04 SlA VlA SlA VlA VM/VR VH 03 04 03 04 03 04 3 position closed center: VFRA43113 position exhaust center: VFRA44113 position pressure center: VFRA45113.2-24

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C