Fieldbus System

3 2 D side U side Station 1 3/4: 3/4" Female thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" Female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

station 4 station 4 station 4 station SQ 5 station 5 station 5 station 5 station VFS Connector terminal no.

VFS

CD CU U side Direct manual override D side Pilot valve manual override 2n-Rc , 1 2 3 4 R 1 1 2 Stations 250 250 D side U side Exhaust cleaner (Option) D side mounting U side mounting 4-Rc 1 8 n: Stations 2-Rc 3 4 Stations L L1 L2 Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245 263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 ( ): 2(B)/4(A) port Rc 3/4

Battery-less

4 Top side parallel motor type: LEYG16E Top side parallel motor type, With lock/motor cover $4 @4 @5 $1 @4 @3 $3 In-line motor type, With lock/motor cover In-line motor type @5 @4 @3 #7 #8 @5 $1 $2 @4 @3 #9$0 !

EX120/121/122

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

Swivels

Nitrile Seals EP Seals Fluorocarbon Seals Size Kit Number Size Kit Number Size Kit Number -4/-6 RK-4/6N -4/-6 RK-4/6E -4/-6 RK-4/6V -8/-10 RK-8N -8/-10 RK-8E -8/-10 RK-8V -12 RK-12N -12 RK-12E -12 RK-12V -16 RK-16N -16 RK-16E -16 RK-16V D Swivels Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-33

ZP

nylon tubing M-5AN-4 N6 For 6 nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 B Model 30 A B Vacuum inlet direction q Pad dia.

Title not found

(800) 526-7661 1/4 NPT Male Thread to Tube 1/4 Male Pipe Thread to Tube not shown not shown 9 16 Hex Typ. 31/32 31/32 3 4 Typ. 1-3/32 1-1/8 1-1/4 9 32 1 1-1/16 44 1/4 B2 1/2 1/4 B2 1/4 B4 1/4 B6 1/4 B3 1/4 B1 1/4 B5 1/4 B8 1/4 B3 1/2 1/4 Male Pipe Straight Manifolds Top View Top View #1 Barb P/N 1/4 B1 x 2 1/4 B1 x 3 1/4 B1 x 4 1/4 B1 x 5 1/4 B1 x 6 1/4 B1 x 7 #2 Barb P/N 1/4

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

) .15 4.5.2 Motor-less operation in PC or PLCetc .18 4 1 4.

Combination Cylinder

4 !5 !6 !

Electric Actuator/Slider Type

4 !2 !0!1 !3 !

Fieldbus System

2 B 2 B 2 B 2 B 2 M12 communication connector (PROFIBUS DP) D-sub communication connector (PROFIBUS DP) 4 4 4 4 A 4 A 4 A 4 A 4 A SI unit Fieldbus Features 1 Series SY3000/5000 Pressure switch Valve piping direction variations M Piping is possible from 3 directions.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

) 2 (n = 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 75 90 100 110 D-A9l n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12

F

M3x0.5 KJS04-M3 1.5 8 18 15.5 14.5 1.4 1.5 4 M3x0.5 KJF04-M3 8 8 18 5.5 14.5 4 3.2 4 M5x0.8 KJS04-M5 2.5 8 20.5 17 14.5 4 2.6 4 M5x0.8 KJF04-M5 8 8 20.5 7.5 14.5 4 3.8 4 R(PT)1/8 KJS04-01S 3 9.8 21.5 17.5 14.5 4 5.3 6 M5x0.8 KJF06-M5 10 10 20 7 15.5 10 5.1 6 M5x0.8 KJS06-M5 2.5 10 21.5 18 15.5 4 3.2 6 R(PT)1/8 KJS06-01S 4 10 22 18 15.5 10 5 Applicable Thread Model H D L A M Minimum Weight

LEC-OM07605CN

(L1L2L3) 3. () () A 4 4.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch for locking a connector 8 3.1 8 36.3 5.5 5.3 FREE LOCK 35 18 28.8 47.6 Terminal no