MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

[74] 51.6 35 27 8 A A 24 (Pitch) P=19 1/8 (A port) 21 Other dimensions are the same as type 42.

Micro Mechanical Valve Series VM1000

roller 45.5 29.2 (A) 2 Symbol 2 port 8 R port (3 port only) P.T.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 135 +8 0 +8 0 +6 0 +4 0 +4 0 80 80 180 , 225 B port A port B port A port CRBU2 100 100 Start of rotation is the position of the key when B port is pressurized.

Table of Contents

, 135 +8 0 +8 0 +6 0 +4 0 +4 0 80 80 180 , 225 B port A port B port A port CRBU2 100 100 Start of rotation is the position of the key when B port is pressurized.

HRX-OM-Y098

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 135 +8 0 +8 0 +6 0 +4 0 +4 0 80 80 180 , 225 B port A port B port A port CRBU2 100 100 Start of rotation is the position of the key when B port is pressurized.

HRX-OM-X071

water (Water-cooled type) .8-12 8.4 Replacement of consumables . 8-14 8.4.1 Replacing Particle Filters .8-14 8.4.2 Replacing the DI filter (Option DM) .8-14 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR050-A/W*-20-* .8-16 8.5.2 HRR050-A*-40-* .8-18 8.5.3 HRR050-W*-40-* .8-19 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR050-A-. 9-1 9.1.2 HRR050-W-. 9-3 9.1.3 Refrigerant

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

4/5 Port Air Operated Valve Series SYJA3000

+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on

HRX-OM-W060

7.4.1 Replacing Particle Filters . 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-10 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A

HRX-OM-M090

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

HRX-OM-W038

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

CNG

8 Nickel plated Lock nut Clip A 25, 32 only Rolled steel Stainless steel %5 !

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

HRX-OM-R016

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

7

Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions.