Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

Heavy Duty Stopper Cylinder

30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 11 18 depth 6 12.5 8.5 40 292.5 121 25 10 45 50 98 25 110 138 24 35 171.5 132 54.5 13 20 depth 6 12.5 10 P (Piping port) Model Stroke R S T V W WB XA XB Y 30 U 5.5 Model Nil TN TF RS2H50 RS2H63 RS2H80 40 21 2 15.5 73 32 5 15.8 10 24 RS2H50 RS2H63 RS2H80 NPT1/8 G1/8 Rc1/8 30 47 24.5 3.5 6.4 16 87.5 38.5 5 18.7 10 24 Rc1/4 NPT1/4 G1/

Wireless System

Link, No Activity (10 Mbps) 7 LINK/ACT1 LINK/ACT2 Orange LED flashes. Link, Activity (10 Mbps) Red LED is ON. IP address has been duplicated. 100 Mbps: Green 10 Mbps: Orange OFF EtherNet/IP is not connected. 15 Wireless System EX600-W Series LED Display Wireless slave unit No. LED name Function Color of LED Operation Green LED is ON.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

FREE MOUNT CYLINDER

Specifications 6 10 16 20 25 32 Bore size Air Fluid M5x0. 8 Rc1/8 Port size 0. 7Mpa Max. operating pressure 1. 05MPa Without switch: -10 to +70 (No freezing) With switch: -10 to +60 (No freezing) 50 to 500mm/s Proof pressure Ambient and operating fluid temperature Piston speed Double acting D type 0. 0125 Single acting T type 0. 0062 0. 025 0. 05 0. 1 0. 2 0. 3 Allowable kinetic energy

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

5 Port Air Operated Valve

VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port] 2 x 4.3 (For mounting) 2 x 4.3 (For mounting) 25.5 10 SYA 10 4A 4A 5 SYJA 1 1 26.4 26.4 20 20 10 1/8 (Pilot port: Upward) 1/8 (Pilot port

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Series VS

WITH LIGHT WITH LIGHT TERMINAL no.1 (+) no.1 (+) A SIDE A SIDE RED RED B SIDE TERMINAL no.1 (+) B SIDE TERMINAL no.1 (+) DOUBLE DOUBLE ZNR ZNR ZNR ZNR TERMINAL no.2 (-) TERMINAL no.2 (-) TERMINAL no.2 (-) TERMINAL no.2 (-) Air Temperature (C) -20 -10 0 10 30 40 50 60 Factor 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 24VDC OR LESS 24VDC OR LESS WITH LIGHT WITH LIGHT TERMINAL no.1 + (-) TERMINAL

SI Unit for Vacuum Manifold

Vacuum/ReleaseInstruction Table 4-10.

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

SI Unit for Vacuum Manifold

24 VDC +10%/-10% Under-voltage detection approx. 18 VDC PWR(V) Operating voltage 24 VDC +10%/-5% Galvanic isolation Yes (between PWR and PWR(V)) Fieldbus Bus protocol PROFINET I/O Version PROFINET Specification Version 2.3 Conformance Class C Yes (Only for IRT switch function) FSU (Fast Start Up) Yes MRP (Media Redundancy Protocol) Yes MRPD (Media Redundancy for Planned Duplication) Yes

Guide Table Series MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Digital Flow Switch (Integrated display type) ( compatible)

ZS-40-M Taptite screw for PF3W711 (4 x 10), 4 pcs.

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Electric Actuators Precautions . 10 2.1 Wiring/Cables . 10 2.2 Design/Selection . 11 2.3 Mounting . 12 2.4 Handling . 13 2.5 Operating Environment . 15 2.6 Maintenance . 15 2.7 Actuator with Lock . 16 2.8 Design/Selection . 17 2.9 Handling . 17 2.10 Mounting . 18 2.11 Power Supply . 19 2.12 Grounding . 19 2.13 Wiring . 19 2.14 Maintenance . 20 3.