Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

(With rod boot on one side) CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 CA2 l l CS1 C76 With rod boot (Both sides) C85 Width across flats KA Width across flats KA C95 CP95 e E NCM NCA l l l + Stroke h + l + Stroke S + Stroke ZZ + 2l + 2 stroke D-X

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Stainless Steel 316 Fittings

L L Union Y: KQG2U 3 x Applicable tube Applicable tube O.D.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148

Mechanically Jointed Rodless Cylinder Series MY2

Applicable cylinder Port variation MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 1118

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

Digital Flow Switch (Remote type monitor unit)

Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/

SV

010 050 1000 mm 5000 mm l Terminal no.

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

Digital Flow Switch

mim 10 to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated pressure range

AC Servo Motor Driver (Pulse input type/Positioning type ）

Refer to section 11.5 for the wire used for the extension cable. 10m or less 2m 50m or less MR-BKS1CBL2M-A1-L MR-BKS1CBL2M-A2-L MR-BKS1CBL2M-A1-H MR-BKS1CBL2M-A2-H 50m LE-CSBExtension cable (To be fabricated) () Servo motor MR-BKS2CBL03M-A1-L MR-BKS2CBL03M-A2-L (5) LE-CSB24VDC power Electoromagnetic (Note4) Trouble (4) Supply for lock Brake(MBR) DC24V (Note3) (MBR) (3) (ALM) (MBR) AWG20

VZS

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

CRBU

R73C 3m: L Ex.) R73CL 5m: Z Ex.) R73CZ : N Ex.)

0.4

4 VVQC1000-T0-1 Terminal block box housing assembly T kit VVQC1000-L25-0-1 L kit with 0.6 m lead wire !5 VVQC1000-L25-1-1 Lead wire housing assembly L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire !6 VVQC1000-M26-1 Circular connector housing assembly M kit, 26 pins 586 VQC1000/2000 Series Plug-in Unit Base Mounted Manifold Assembly Part No.

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Booster Regulator/Air Tank

VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option

Air Cylinder

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no.

PF3W7x.eng

Key-lock function 4 OUT1 (C/Q) Hysteresis H_1 Flow [L/min] Safety Instructions 5% of maximum rated flow [00.20] 0.20 L/min (4 L type) [000.8] 00.8 L/min (16 L type) [002.0] 02.0 L/min (40 L type) [00.05] 0.05 L/min (100 L type) [00.12] 0.12 L/min (250 L type) The self tapping screws should not be re-used. Self tapping screws (4 pcs.)