AW

Dimensions Refer to drawings on page 5 Standard mm Dimensions Mounting Bracket Kit (Optional) AF20P-050AS-X480 AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 97 149 185 M 5.4 6.5 8.5 R 26 35 47 N 8.4 8 10.5 Q 2.3 2.3 2.3 L 22 23 26 P 40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32

Soft Start-up Valve

m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32

3 Position Cylinder Series RZQ

3 Position Cylinder Series RZQ 32, 40, 50, 63 Replacement Procedure is P.367 Construction @4 @1 !9 @2 @0 @3 @3 @2 The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series RZQ. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

output + analog voltage 100 to 100 kPa/NPN open collector 2 outputs 100 to 100 kPa/PNP open collector 2 outputs 100 to 100 kPa/NPN open collector 1 output + analog voltage 100 to 100 kPa/PNP open collector 1 output + analog voltage Specification ZQ1-ZSEA--A ZQ1-ZSEB--A ZQ1-ZSEC--A ZQ1-ZSEE--A ZQ1-ZSFA--A ZQ1-ZSFB--A ZQ1-ZSFC--A ZQ1-ZSFE--A 6 Series ZQ Dimensions Type K1 ZQ1 1U-K1 5 6 23 32

Slit Valve XGT Series

Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32

Series: LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 500mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R1 (1.5m), Controller

Magnetically Coupled Rodless Cylinder/Slider Type: Slide Bearing Series CY1S

Magnetically Coupled Rodless Cylinder/Slider Type: Slide Bearing Series CY1S Replacement Procedure is 6, 10, 15, 20 25, 32, 40 P.317 Construction Slider type, slide bearing Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Size: 32, Motor Mounting Position: D (In-line), Lead: C (Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Actuator Cable Type, Length: M5 (5), Controller: C91 (Ether Net/IPâ„¢), Controller Mounting: 7 (Screw Mounting), Communication Plug Connector, I/O Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic, Body Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor Type: G (High Performance, Battery-less Absolute), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm

Series: LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 350mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R5 (5m)

Size: 32, Motor Mounting Position: D (In-line), Lead: C (Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Actuator Cable Type, Length: MN (None), Controller: w/o Controller, Controller Mounting: None, Communication Plug Connector, I/O Cable: None

High Power Cylinder Series RHC

High Power Cylinder Series RHC Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.364 Construction Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters @5 @1 @0 !9 !

PEAPP Series

Note: 4mm tubing is suitable for use with 5/32 SMC One-touch fittings as is 8mm tubing and 5/16 fittings. 4, 6, 8, 10 and 12mm are commonly available in black, blue and natural only, other colors are special order. NF-36-03-C02-11

Mechanically Jointed Rodless Cylinder/Linear Guide Type

A: Black zinc chromated MY-16B-stroke, B: Nickel plated MY-16BW-stroke 100 Mechanically Jointed Rodless Cylinder/Linear Guide Type Construction Series MY1H Replacement Procedure is 16, 20, 25 32, 40 P.310 With End Lock: 16 to 40 Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

VDW

Refer to page 252 and 253 regarding manifold additions. 249 Series VDW10/20/30 Dimensions VV2DW2 (25.5) 16 1 16 Approx. 300 11 4.6 1 33 24 (19.5) 19.5 R2.3 L3 L2 L1 2 x 1/4 (IN port) (: Thread type) 4.5 9 1 Stations D side 2 3 4 5 n U side VDW23-*G-* VDW23-*G-* VDW23-*G-* VDW23-*G-* 70 31.5 21 18.5 (OUT port) n x 1/8 n x M5 x 0.8 11 P = 22 11 1.5 4.5 54 6 32 6 (19.5) 9.5 11 9.5 11 46 10 24

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 100

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 100, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 100, Motor Option: B (with Lock)

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)