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Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: A93, Lead Wire Length(m): 3, The number

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: A93, Lead Wire Length(m): 3, The number

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9BA, Lead Wire Length(m): 5, The number

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9N, Lead Wire Length(m): 0.5, The number

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9P, Lead Wire Length(m): 0.5, The number

Magnet: Built-in, Mounting: Front Flange, Bore Size: Ø20, Piping: NPT, Stroke: 250mm, Rod Boot: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

C Update the photos of Spacer and Spacer with bracket to the latest version. Update the Construction to the latest version.

Dimensions Standard specifications Model P1 P2 A B C D E F G H J Single Double VHS20-D 1/8, 1/4 1/8 48.5 51.7 23 40 37 28 42 17.5 40 21 VHS30-D 1/4, 3/8 1/4 55 58.2 32 53 49 38 53 20 53 26.5 VHS40-D 1/4, 3/8, 1/2 3/8 69.7 73.9 41.3 70 63 52 71 29 70 35.5 VHS40-06-D 3/4 1/2 71.7 75.9 43.3 75 63 52 71 29 70 35.5 VHS50-D 3/4, 1 1/2 86.5 90.7 44.5 90 80 72 90 33 90 45 Options specifications With

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

L/min w e L t Unit display of flow rate for air/ Red (PF2A200, 201 for air only) CH1 to 4 will illuminate when the normal condition (nor) is selected. e OUT1 CH y Unit display/Orange Illuminates the selected unit.

Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. Keep it at 2% or less of the rated voltage.

Place where ambient humidity exceeds the range of 35% to 85% RH. c. Place where condensation occurs due to sudden temperature change. d. Place where atmosphere containing corrosive gas, flammable gas or organic solvent. e.

Table 1 Moment of inertia Size Allowable kinetic energy (J) 10 0.00015 15 0.00025 20 0.0004 30 0.015 40 0.03 How to calculate the load energy E : Kinetic energy (J) I : Moment of inertia (kg m Speed (rad/s) : Rotation angle (rad) 1803.14 rad t : Rotation time (s) 1 E = I 2 2 2 = t Table 2 Safety operable rotation time adjustment range Size Rotation time ( s / 90) 10 0.03 to 0.5 15

Operating Pressure Max. operating pressure (MPa) Group Model 20oC 100oC 200oC 260oC 2.4 Max. operating pressure (MPa) A B TLM0201 TLM0425 TLM0302 TLM0604 TLM0403 TLM0806 TLM1075 TLM1209 TLM1008 TLM1613 TLM1210 TLM1916 TLM2522 2.3 1.7 1.1 0.9 0.55 0.45 0.3 0.23 2.2 A 2.0 1.8 C 1.5 0.7 0.35 0.2 B 1.6 1.4 C 1.2 D 1 0.5 0.25 0.15 1.0 0.8 0.6 E 0.7 0.35 0.17 0.11 0.4 0.2 F 0.6 0.3 0.15 0.1 0.0

Edit (E) Cut The selected step data is cut. Copy The selected step data is copied on the clip board. Paste The selected step data is pasted. Delete The selected step data is deleted. Undo The step data is restored to the condition before the action. Comm (C) Comm reset The connected controller is confirmed and step data is loaded again.

x n +4 x (n -1) -57No.PS-OMM0002CN-F A B C D E 4 OFF F SMC URL http://www.smcworld.com 2008-2014 SMC Corporation All Rights Reserved No.PS-OMM0002CN-F

[September 2016] C: Contents revised in several places. [June 2018] D: Contents revised in several places. [February 2020] E: Contents are added. [February 2021] F: Contents revised in several places. [January 2022] G: Contents revised in several places. [October 2022] H: Contents revised.

id=AS-IL-E" target="_blank">here. And the AS series large flow in-line type catalog can be found here.

There is also a special order product that can be used in high temperatures of up to 150°C (special order part number suffix “-X221”).