3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2.

Table of Contents

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Slotted) : Non-locking push style (Flush) VP 4 1 (P) 3 (R) VQ VQZ Body style 2 Body ported Electrical entry VZ G: Grommet (DC Specification) L: L plug connecor with lead wire M: M plug connecor with lead wire MO: M plug terminal without connector LO: L plug terminal without connector VS Function Symbol Specification DC AC (1.0W) (3) Standard (1) High pressure (Metal seal only) (1.0W) K YZ

VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

Series VS

position A06T Side 3/4 For VSR/S8-8, 8-10 Number of Solenoid FHG 3-position, Closed center FJG 3-position, Exhaust center A10T Side 1 For VSR/S8-10 B02T Bottom 1/4For VSR/S8-6 B03T Bottom 3/8For VSR/S8-8 B04T Bottom 1/2For VSR/S8-10 S Single D Double FIG 3-position, Pressure center YHZ 3-position, Dual Closed center YIZ 3-position, Dual Pressure center * * YJZ 3-position, Dual Exhaust center YZ

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

suppressor VZ 3 Position exhaust center L plug connector (L) (A) 4 (B) 2 VF Non-locking push style (Flush) VQZ3000 5 (R1) 1 (P) 3 (R2) VFR (Standard) 12V DC 24V DC 3 Position pressure center 0.7 0.9 Body Ported L plug connector (L) (A) 4 (B) 2 VP7 1 (P) 3 (R2) 5 (R1) M plug connector (M) M plug connector (M) (Option) 100V AC 200V AC 110V AC 220V AC VP4 VQZ1000 0.15 0.3 (A) 4 VQ DIN connector (YZ

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Position exhaust center L plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ

VQZ1000/2000/3000

Y: DIN terminal (1) YO: DIN terminal (1) without connector YZ: DIN terminal (1) YOS: DIN terminal (1) without connector YS: DIN terminal (1) Body 5 Base mounted With surge voltage suppressor With surge voltage suppressor With light/ surge voltage suppressor Seal 0 1 Metal seal Rubber seal Note 1) Applicable to VQZ2000 and 3000.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Coil Varistor Light/surge voltage suppressor (YZ) Locked position +Coil PUSH LOCK Varistor With light (YZ) Coil Varistor Precautions When operating with a screwdriver, turn it gently using a watchmakers screwdriver.

VQZ Series

With light (YZ) Note) Surge voltage suppressor of varistor has residual voltage corresponding to the protective element and rated voltage ; therefore, protect the controller side from the surge voltage. The residual voltage of the diode is approximately 1V. Caution Connection of Lead Wire Not necessary if ordering the lead wire pre-connected model.

VFR

Y YZ DIN terminal (DIN43650B type) 3-5-54 55 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR4000 Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

Soft Start-up Valve

DIN Terminal With light/surge voltage suppressor (DZ, YZ) DIN terminal has no polarity M12 Connector With light/surge voltage suppressor (WOZ) Connect correctly the lead wires to + (positive) and (negative) indications on the connector.

V

A N U A L O V E R R I D E Non Locking Push Type (Tool Type) B Slotted Locking Type (Tool Type) 5 Base Mounted B O D Y T Y P E E L E C T R I C A L E N T R Y L L Type Plug Connector with Lead Wire LO L Type Plug Terminal without Connector M M Type Plug Connector with Lead Wire MO M Type Plug Terminal without Connector Y DIN Connector (VQZ200/300) YO Terminal without Connector (VQZ200/300) YZ

HEC-OM-Y008

Dec Z yZ ZZ AZ BZ CZ DZ . 400 400 This manual provides the following symbols in addition to Danger, 300 300 This unit does not use parts that meet the SCCR specifications.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Y YZ DIN terminal (DIN43650B type) 1275 Series VFR4000 Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added. 19: Not included for options Z is selected. 20Not included for options Z,Z1 is selected. 9.1 Specifications HRR Series 9-2 HRX-OM-X084 Chapter 9 Documents 9.1.2 HRR010-W-10/20Table 9-2 Specifications [HRR010-W-10/20-(DMT1)U(YZ)] Model HRR010-W-10-(DMT1)U(YZ) HRR010-W-20-(DMT1)U(YZ) Cooling method Water-Cooled refrigerated

Electric Actuator Triple Axis P&P Unit

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

Soft Start-up Valve

Grommet Locked position With light (GZ) () Varistor Coil () DIN Terminal Caution With light (DZ) (YZ) When locking the manual override on the push-turn locking types (B, C), be sure to push it down before turning.

Soft Start-up Valve

Grommet Locked position With light (GZ) () Varistor Coil () DIN Terminal Caution With light (DZ) (YZ) When locking the manual override on the push-turn locking types (B, C), be sure to push it down before turning.

V100

DC EZ, TZ, DZ, YZ (100 VDC or more) EZ, TZ, DZ, YZ (100 VDC or more) Z EZ, TZ, DZ, YZ (24 VDC or less) Note) W/ surge voltage suppressor is available only for grommet type. 4-8-3 4 Series VP300/500/700 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Change of Actuation Caution How to Use DIN Terminal 1.