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ISE PSE Construction Flow Characteristics Z I SE3 Fluid: Water, Outlet pressure: 0 MPa Sealing thread depth: 9 mm (3/4), 11 mm (1) Upper insulator Micro switch PS Flow range (l/min) Retaining screw Flow adjusting screw Mounting Flow switch Z I SE1 2 Minimum Maximum ON-flow rate/setting (m/s) ON flow Paddle size Port size ON flow OFF flow (min) OFF flow (min) ZSP Retaining screw ISA2 38 33

1.08 1.23 1.4 1.56 1.72 1.88 2.04 2.20 2.36 2.52 2.88 2.84 3.00 3.16 3.22 11-LEFG40-S 2.07 2.29 2.51 2.72 2.94 3.15 3.37 3.58 3.80 4.01 4.23 4.44 4.66 4.87 5.09 5.30 5.52 5.73 527 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33

. *8 Indicates case of grommet type Flow Rate Characteristics Face seal fitting/Compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Female thread XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.54 1.14 1.14

Female thread One-touch fitting 4 tube 6 tube 8 tube M5 x 0.8 1/8 (Rc, NPT, NPTF) 33 10 to 16 20 to 32 40, 50 30 32 133 128 139 159 158 167 Weight by Stroke (g) Pad dia.

Booster regulator IN port Rc 1/4 Tank IN port Rc 3/8 3 R 1/4 Tank OUT port Rc 3/8 33 10 20 18 8 60.5 (Fully closed) 366 65 (Fully closed) 8.7 3.5 Hexagon across flats19 Drain port 4-11 mounting hole 14-9-8 9 Air Tank VBAT05 to 38 Dimensions VBAT10, VBAT10S With booster regulator VBA1100/VBA1 connected. Tank IN port Rc 1/2 Booster regulator IN port Rc 1/4 F.R.L.

Two mounting methods Two mounting methods Plug connection Plug connection Controller PSE300 Low differential pressure sensor PSE550 e-con connector Direct mounting Bracket mounting 16-3-33 2 Low Differential Pressure Sensor Series PSE550 How to Order PSE550 Option 2 (Connector) Nil None Connector for PSE300 multiple channel pressure controller 1 pc.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 16 300 11 1 24 33 19.5 (19.5) (: Thread type) 21/4 (IN port) R2.3 4.5 9 L1 L2 L3 1 Stations D side 2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7

6 Module 7 diagnostics 0Module 7 1Module 7 7 Module 8 diagnostics 0Module 8 1Module 8 Valve diagnostics 2 . 5-10 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 0 1 1 Valve 18, 19 diagnostics 0 1 2 Valve 20, 21 diagnostics 0 1 3 Valve 22, 23 diagnostics 0 1 4 Valve 24, 25 diagnostics 0 1 5 Valve 26, 27 diagnostics 0 1 6 Valve 28, 29 diagnostics 0 1 7 Valve 30, 31 diagnostics 0 1 33

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the wire insulation material, whichever is larger. Replace any damaged lead wire with a new one. Wire correctly. Incorrect wiring can damage the product. Do not perform wiring while the power is on.

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the wire insulation material, whichever is larger. Replace any damaged lead wire with a new one. Wire correctly. Incorrect wiring can damage the product. Do not perform wiring while the power is on.

External gripping S 7.1 27 33 45 131 217 force I.D. Internal C 13 38 57 83 161 267 gripping force Open/close stroke (Both sides (mm) 4 6 10 14 22 30 230 420 715 1,275 Note 2) Weight (g) D 55 115 SC 235 425 760 1,370 Note 1) Values based on pressure of 0.5 MPa, gripping point L=20 mm, at center of stroke. Note 2) Values excluding weight of auto switch. 4 - 2.

More than 33 valves are connected Check the total number of solenoid valves connected to the manifold is 32 or less. Ensure the total number of solenoid valves is 32 or less. -19No.EX-OMO0007-E Maintenance Mounting/Wiring Item Criterion Remedy Check the SI unit connector for the communication and the power supply are connected properly. Perform extra tightening.

Note 8) Grommet value. 10 XSA-OMS0001-A Fluid property Face seal fitting / compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 C [dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Threaded ports XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 C [dm3/(sbar)] 0.54 1.14 1.14 2.23 2.37 3.5 b 0.36 0.39 0.42 0.38 0.40 0.15 3.

Machining tapped hole, drilled hole and pin hole additionally -XC79 -XB13 Low speed cylinder (5 to 50 mm/s) Theoretical Output -XC3 Special port location (N) -XC19 Intermediate stroke (Spacer type) Piston area (mm2) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN

(Example) F9BV 3m.L (Example) F9BVL Refer to p.2.11-1 for auto switch specifications. 2.3-3 2 Finger Air Gripper Series MHR2/MDHR2 Model/Specifications 10 20 30 Nominal size 15 Action Double acting Holding force (N) (Effective value) (1) at 0.5MPa 12 33 58 External hold 24 12 34 59 Internal hold 25 Finger closing width (mm) Finger opening width 10 16 19 14 Opening/closing stroke (Both sides

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 5 26.5 31.5 3.5 150 (Lead wire AWG#26) VT 33 3.5 2-3.4 Mounting hole VP VG VP P = 7.2 4 7.1 L2 L1 S070 VQ n U side 1 2 3 4 5 D side VKF (11.5) VQZ 9.5 5 VZ VS VFN Dimensions Formulas: L1 = n x 7.2 + 7, L2 = n x 7.2 + 15, n: Stations

.: SY100-77-1A Round head combination screw SY100-33-2 (M1.7 x 7, matt nickel plated) Blanking plate SY100-77-1 Gasket VJ100-20-2 Applicable base Sub-plate Type SS3Y1-30 Type SS3Y1-31 Type SS3Y1-S41 Applicable base Sub-plate (For body ported type) SS3Y1-30 type SS3Y1-31 type Applicable base Sub-plate Type SS3Y1S41 Manifold base Manifold base Manifold base 12 Series SY100 Type 30 Manifold

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. 33 Series SYJ700 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1R2 (PRA) 2R3 (ARR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ712 SYJ722 SYJ714 SYJ724 SYJ714 SYJ724 Body ported 0.76 0.69 0.69 0.63

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2