LFE-OMZ0012

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the piping may become loose. The product body is made of resin.

Low Friction Cylinders Series MQ

TH TY TX TV TW 2 x TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

Modular Type Regulators Series AR

27.8 26.5 28.5 2 1/8, 1/4 40 94 M28 x 1 28.5 29.5 40 37.5 65 37.5 65 1/8 28 27.8 27.5 28 0 101 1/4, 3/8 53 M32 x 1.5 27.5 28.5 39 37.5 64 37.5 64 1/8 28 27.8 29.5 116 31 3.5 1/4, 3/8 M38 x 1.5 29.5 30.5 41 37.5 66 37.5 66 1/8 53 AC 28 27.8 34 36 128 M42 x 1.5 34 3.5 35 45 42.5 74 42.5 74 70 1/4 1/4, 3/8, 1/2 28 27.8 36 34 3 75 129 M42 x 1.5 34 35 45 42.5 74 42.5 74 3/4 1/4 AF 28 27.8 43.5

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

VXD21/22/23

28 M 82 (92) 93 (103) 98 (108) N M 82 (92) 93 (103) 98 (108) M 82 (92) 93 (103) 98 (108) Normally open Normally closed VXD2270 VXD2380 VXD2390 VXD2272 32A 40A 50A VXD2382 VXD2392 48 50 50 95 97 97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Compact Cylinder

Series CQ2 Stroke S2 Stroke S1 L B1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range A B1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

Electric Grippers

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Insulation color Connector pin No.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

PF2x5.eng

White Analogue output Load 2 Body The body of the product. 28 to 30 Nm Rc(NPT)3/4 PF2W540(T) CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

MHT2

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to 28

MLGP

Flat head watchmakers screwdriver Hexagon wrench key 2 Auto switch mounting bracket BMG1-040 Hexagon socket head cap screw (M2.5 x 8l ) Switch mounting screw (M2.5 x 4l ) (Included as accessory) Auto switch Hexagon wrench key 2.5 Hexagon socket head cap screw (M3 x 16l ) Auto switch 9-11-28 28 Compact Guide Cylinder with Lock Series MLGP Operating Range Auto switch model Bore size (mm) 25

Compact Cylinder with Air Cushion Series RQ

0 +0.4 +0.2 0.2 0.4 +0.058 0 36 16 12 14 41.6 22 M14 x 1.5 +0.058 0 +0.5 +0.3 0.3 0.5 +0.058 0 44 20 16 20 50.6 28 M18 x 1.5 +0.070 0 +0.5 +0.3 0.3 0.5 +0.070 0 Knuckle pins and snap ring are included.

Series VCL

Proper tightening torque Nm Tightening torque for piping Connection threads 7 to 9 Rc 1/8 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 1Nm = 0.7375ftlb 5.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

3

Maximum load current 80 mA Maximum applied voltage (NPN only) 28 VDC Internal voltage drop (Residual voltage) NPN output type: 1 V or less (at load current 80 mA) PNP output type: 1.5 V or less (at load current 80 mA) Response time Note 3) Select from 0.05 sec., 0.1 sec., 0.5 sec., 1 sec., or 2 sec.

3 Position Cylinder Series RZQ

63 130 102 39.5 16.5 36.5 21.5 10.5 M10 x 1.5 45 M16 x 2.0 84 21 77 15 103 7 36 28 60 9 14 Rc 1/4 18 4.5 6.5 19 1226 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 32 30 18 6.6 4 107.7 82.5 66.5 Special cap bolt 40 33 92 76 18 6.6 4 117.2 50 39 96.5 73.5 22 9 5 126.7 LY 63 46 102 76 28 11 5 138.2 LH Bore size (mm) LX LY

ASR

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

x V Effective thread depth Y H A B E G Mounting nut width across flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28

ZMA

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31