Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

XM, XY

G J K L M Indicator Without indicator Pilot port direction Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Right flange surface Left flange surface A F J

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

Konstruktorska 11A, PL-02-673 Warszawa, Poland TEL: 022-548-5085 FAX: 022-548-5087 HONG KONG SMC Pneumatics (Hong Kong) Ltd. 29/F, Clifford Centre, 778-784 Cheung, Sha Wan Road, Lai Chi Kok, Kowloon, Hong Kong TEL: 2744-0121 FAX: 2785-1314 TURKEY (Distributor) Entek Pnmatik San.ve Tic. Ltd. Sti Perpa Tic.

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

Heatless Air Dryer Series ID 1

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

Special Specifications:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body size Thread type (3) 2B 4B 8B 11B 22B 37B 75B Nil Rc F G N NPT Accessory (Option) A With drain cock (1) Note 3) Corresponds to attachment symbols C, D, and J. Select according to the type of threads used on the body.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

CRQ2

BE J JA JB BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25 M10 x 1.5 M10 x 1.5 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29

CC

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Rc 1/8 Pilot air port port (Stop valve side) Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore

10-cl1-e

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) @7 E F G H J K Rod seal Wiper ring Piston seal Valve seal NBR Tube gasket Retaining plate gasket As for the center trunnion type, it is very difficult to adjust the position of the trunnion bracket and the center of the axis. Therefore repair at SMC is recommended.

10-cy3r-e

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) 112

Mounting: Front Nose Mount, Bore Size: 3/4", Stroke: 1/2", Option: XB7 [Cold Resistant (-22°F to 158°F)]

Mounting: Front Nose Mount, Bore Size: 3/4", Stroke: 5", Option: XB7 [Cold Resistant (-22°F to 158°F)]

Mounting: Front Nose Mount, Bore Size: 7/8", Stroke: 1/2", Option: XB7 [Cold Resistant (-22°F to 158°F)]

Mounting: Front Nose Mount, Bore Size: 1 1/16", Stroke: 1", Option: XB7 [Cold Resistant (-22°F to 158°F)]

Mounting: Rear Pivot Mount, Bore Size: 3/4", Stroke: 1/2", Option: XB7 [Cold Resistant (-22°F to 158°F)]

Mounting: Rear Pivot Mount, Bore Size: 3/4", Stroke: 4", Option: XB7 [Cold Resistant (-22°F to 158°F)]

Mounting: Rear Pivot Mount, Bore Size: 7/8", Stroke: 2 1/2", Option: XB7 [Cold Resistant (-22°F to 158°F)]

Mounting: Rear Pivot Mount, Bore Size: 1 1/2", Stroke: 1 1/2", Option: XB7 [Cold Resistant (-22°F to 158°F)]