MLGP

YY depth YL Section XX Bottom view Extension locking Retraction locking LOCK LOCK Section XX 4-OA through 4-OB depth of counter bore OL Section XX 4-NN through IH Z WA IA IC IC L 4-MM depth ML X 0.02 HA: T-slot for hexagon bolt IG X 0.02 DA IB VA H ID R VB X U T PW DB 2-Rc 1/8 (plug) IF unlocking port XAH7 depth 6 2-Rc 1/8 Unlocks when pressurized PB GA GB J K PA + Stroke Q XAH7 depth 6 S

MLGP

YY depth YL Section XX Bottom view Extension locking Retraction locking LOCK LOCK Section XX 4-OA through 4-OB depth of counter bore OL Section XX 4-NN through IH Z WA IA IC IC L 4-MM depth ML X 0.02 HA: T-slot for hexagon bolt IG X 0.02 DA IB VA H ID R VB X U T PW DB 2-Rc 1/8 (plug) IF unlocking port XAH7 depth 6 2-Rc 1/8 Unlocks when pressurized PB GA GB J K PA + Stroke Q XAH7 depth 6 S

Compact Vacuum Ejector Series ZA

KJS04-M5 KJS06-M5 KJL04-M5 KJL06-M5 M-5P Without fitting (M5 x 0.8) 4 (Straight) 6 (Straight) 4 (Elbow) 6 (Elbow) With plug Manifold model Ejector nozzle diameter ZH 0.5 0.7 -2P (KJ04-M5 one side) -5P (KJL04-M5 one side) Stations ZZA1 4 stations 2 stations ZU -22 (KJ04-M5 both sides) -55 (KJL04-M5 both sides) Stations ZZA1 8 stations 4 stations ZL -3P (KJS06-M5 one side) -6P (KJL06-M5 one

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

17

4 t !0 @4 @1 u w !2 !4 q !6 y @3 r !0 o @4 t !0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more 12 to 25 50 stroke or less 12 to 25 Over 50 stroke 50 or more Component Parts Component Parts No. Description Material Note Ball bushing Spacer Steel ball Plug Piston seal Rod seal Gasket A Gasket B No.

Rotary One-touch Fittings Series KS/KX

17 14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75 92 14 4 13.4 10.4 8 1 4 17 17 18.5 15.2 6 26.1 18.0 3 8 1 4 10 3 8 1 2 3 8 1 2 22 18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

KS/KX

10.4 13.4 13.2 4 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5 18.0 26.1 15.2 6 5 16 1 4 1 4 3 8 17.46 17 22.23 29.5 36.3 17.9 7 3 8 22 21 Connection thread Applicable tubing Connection thread (With seal) Male Elbow: KSL (Standard) Applicable tubing O.D.

53

Automatic fluid fill port Rc3/8 R NPT3/8 or G3/8 Overflow port Rc3/4 R NPT3/4 or G3/4 The conversion fittings for circulating fluid outlet/return port, drain port, facility water inlet/outlet (for water-cooled refrigeration) are also included. 2 pcs./set Part no.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM. AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !

MK

4 !5 !6 !7 !8 !

LFE-OMZ0011

Pin description 4 2 1 DC(+) 2 OUT2 1 3 DC (-) Connector on the body 4 OUT1 Connector pin numbers (male connector) 3 4 2 No.

Low-Speed Rotary Actuator

Description Qty. 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 Parts includid 19 Gasket for cover 2 19 Gasket for cover 2 19 Seal 1 19 Seal 1 19 Seal 1 in seal kit 20 Gasket for end cover 1 20 Gasket for end cover 1 20 Gasket 4 20 Gasket 4 20 Gasket 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 22 Seal washer 2 22 Seal washer

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

CEx-OMB0060

Contents Chapter 1: Read Before Use 1 Chapter 2: Product Summary 4 2-1. How to Order 4 2-2. Outside Dimensions 4 Chapter 3: Functions and Terminology 5 Chapter 4: Specifications 8 Chapter 5: Description of Each Part 10 Chapter 6: Wiring 6-1. Terminal block arrangement 11 6-2. Wiring of sensor input part 11 6-3. Wiring of control signal input part 12 6-4. Wiring of output part 12 6-5.

3

12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Gasket Body Low tightening torque Tight seal Stainless steel 316 Specifications Applicable tubing material FEP (3) Nylon Soft nylon (1) Polyurethane Super PFA (2) Modified PTFE (4) 3.18/2 4/2.5 6/4 4/2.5 6/4 3.18/2.18 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 6/4 Applicable tubing O.D.

Wedge Cam Operation Provides

4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

Large Size Vacuum Module: Series ZR

(Single unit) ZR1-RV1-4 1pc. (Function plate) ZR1-R1-4 1pc.

I

10V DC 2 1/4 (2000, 3000 Type) 3 3/8 (2000, 3000 Type) 4 1/2 (3000 Type) T H R E A D T Y P E M O N I T O R O U T P U T Rc N NPT T NPTF F G 1 Analog Output 1 ~ 5V DC 2 Switch Output / NPN Output 3 Switch Output / PNP Output 4 Analog Output 4 ~ 20mA DC Courtesy of Steven Engineering, Inc. !