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Fixed 4% F .S.

Electric Actuators

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 30 4.

Table of Contents

3.5 x 7, 4 x 10 Thin section series (10 to 16) 4 Nylon tube 4 Urethane tube 4 tube 6 tube Applicable tube dia.

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 33 4.

5 Port Solenoid Valve

4 A 4 A 4 A 4 A 4 A 4 15.7 11.5 (6.5) 21.5 M12 1/8" PE port 1/8" External pilot port 27 31 38.7 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port P = 25 65.5 Note) The dimensions of the bottom ported type are common to all S kits.

Air Fittings & Tubing

3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 X 0.8 M6 X 1.0 12.7 13.9 8 4 4 4 1 8 1 4 18 13.5 14.7 14.9 18.5 17 15.5 24 20.5 15.5 26 27.5 22.5 19 28.5 23.5 22 33 27.5 5.6 4 16 M5 X 0.8 M6 X 1.0 10 4 4 13.5 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 13.1 10.4 17 14 8 26.1 18.0 18.5 17 26.1 26.1 17 21 10 3 8 41.5 29.5 22 1 2 1 4 19 12 3 8 22 58.3 46.1 30 22 1 2 81 (81) 113 (96)

LEC-OM071xx

Operation.4-3 4.1 MECHATROLINK-III Communications Settings.4-3 4.1.1 Setting Switches S1, S2, and S3.4-3 4.2 MECHATROLINK-III Commands.4-4 4.3 Basic Functions Settings.4-4 4.3.1 Servomotor Rotation Direction.4-4 4.3.2 Overtravel.4-5 4.3.3 Software Limit Settings.4-8 4.3.4 Holding Locks.4-9 4.3.5 Stopping Servomotors after SV_OFF Command or Alarm Occurrence.4-14 4.3.6 Instantaneous Power Interruption

Air Cylinder Series CA2

2 (n = 4, 8, 12, 16) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) 85 + 40 (n 4) 2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) 15 + 40 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) CJ1 2 (Different surfaces and same surface) 1 55 60 65 10 50 CJP D-A9V (n 2) 2 50 + 30 (n 4) 2 (n = 4, 8, 12, 16) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) 60 + 30 (n 4) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) 10 + 30 n (n = 2, 4, 6, 8) (n = 4, 8,

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

For external pilot specification L5 7 VQC (L4) (5) L2 (Rail mounting hole pitch: 12.5) L3 11 18.3 SQ 3/5 R 3/5 R A 4 A 4 A 4 L1 A 4 A 4 (Station n) .

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS 1 4 S mount VV5F3-70 Individual Side Side plate Bottom Valve Top Valve 1 8 1 4 1 4 VF370 VS4 1 4 VV5F3-71 Individual Side Side plate Side Valve Side Valve 1 8 VF3170 (Single solenoid only) 1 4 1 4 1 4 VQ7 Note 1) Supply (P port) is common.

Smooth Cylinder/Low Speed Cylinder

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40(n 2) 2 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs.

LEC-OM02704CN

414-40 4.1 43 4.2 46 4.3 47 4.3.1 47 4.3.2 48 4.3.3 CNP1CNP2CNP3 4-10 4.4 4-17 4.5 () 4-18 4.5.1 4-18 4.5.2 4-21 4.5.3 4-22 4.6 () 4-22 4.6.1 / 4-22 4.6.2 4-23 4.6.3 4-26 4.7 4-27 4.8 4-28 4.8.1 4-28 4.8.2 4-29 4.8.3 4-31 4.9 4-32 4.10 4-33 4.10.1 4-33 4.10.2 4-34 4.11 4-35 4.11.1 4-35 4.11.2 4-36 4.11.3 (LE--) 4-39 4.12 4-40 2 - 5 515

M-E05-1-LQ1

4-12 LQ1-4N12 LQ1-4B12 LQ1L42-Mm 4 4-10 LQ1-4N10 LQ1-4B10 LQ1L43-Mm 4 4-12 LQ1-4N12 LQ1-4B12 LQ1L44-Mm 4 4-10 LQ1-4N10 LQ1-4B10 LQ1L45-Mm 4 3-08 LQ1-3N08 LQ1-3B08 LQ1L46-Mm 4 3-06 LQ1-3N06 LQ1-3B06 LQ1L47-Mm 4 2-04 LQ1-2N04 LQ1-2B04 LQ1L4F-Mm 4 2-03 LQ1-2N03 LQ1-2B03 LQ1L49-Mm 4 4-12 LQ1-4N12 LQ1-4B12 LQ1L51-Mm 5 5-19 LQ1-5N19 LQ1-5B19 LQ1L52-Mm 5 5-12 LQ1-5N12 LQ1-5B12 LQ1L53-Mm 5 5-19 LQ1

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

SX

When ozone enters or is generated in the air supply. 2 4 2 4 2 4 Applicable solenoid valves: Series SX3 0, SX5 0, SX7 0 3 5 7 20 40 X90 SX Model no. Entry is the same as standard products.

AS

Flow Rate and Effective Area AS121F-M3 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F-M5 AS131F-M5 Model AS131F-M3 AS121F-M5-02 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size 2, 3.2, 4 3.2, 4, 6 3.2, 4 Tubing O.D. 1/8", 5/32" 1/8", 5/32" 3/16", 1/4", 1/4", 5/16", 1/8", 3/16" 3/8" 1/4" Inch size 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 1/4", 5/32" Flow rate l /min

Table of Contents

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.