Magnet: Built-in, Mounting: Boss-cut/Rod Flange, Bore Size: 32mm, Stroke: 250mm, Rod End Thread: Male Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Magnet: Built-in, Mounting: Foot, Bore Size: 32mm, Stroke: 250mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Magnet: Built-in, Mounting: Foot, Bore Size: 32mm, Stroke: 250mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Magnet: Built-in, Mounting: Foot, Bore Size: 25mm, Stroke: 250mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: High speed / high frequency, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1.0, Port thread type: NPT, Auto Switches: M9B, Lead Wire Length(m):

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: A93, Lead Wire Length(m): 3, The number

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: A93, Lead Wire Length(m): 3, The number

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9BA, Lead Wire Length(m): 5, The number

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9N, Lead Wire Length(m): 0.5, The number

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Auto Switches: M9P, Lead Wire Length(m): 0.5, The number

Magnet: Built-in, Mounting: Front Flange, Bore Size: Ø20, Piping: NPT, Stroke: 250mm, Rod Boot: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Pressure Relief 3 Port Valve With Locking Holes

C Update the photos of Spacer and Spacer with bracket to the latest version. Update the Construction to the latest version.

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Standard specifications Model P1 P2 A B C D E F G H J Single Double VHS20-D 1/8, 1/4 1/8 48.5 51.7 23 40 37 28 42 17.5 40 21 VHS30-D 1/4, 3/8 1/4 55 58.2 32 53 49 38 53 20 53 26.5 VHS40-D 1/4, 3/8, 1/2 3/8 69.7 73.9 41.3 70 63 52 71 29 70 35.5 VHS40-06-D 3/4 1/2 71.7 75.9 43.3 75 63 52 71 29 70 35.5 VHS50-D 3/4, 1 1/2 86.5 90.7 44.5 90 80 72 90 33 90 45 Options specifications With

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Digital Flow Switch For Air/Water Series PF2A/PF2W

L/min w e L t Unit display of flow rate for air/ Red (PF2A200, 201 for air only) CH1 to 4 will illuminate when the normal condition (nor) is selected. e OUT1 CH y Unit display/Orange Illuminates the selected unit.

Check Valve Series AK

Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

Low Profile 2/3-Port Solenoid Valve

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. Keep it at 2% or less of the rated voltage.

CEx-OMB0075

Place where ambient humidity exceeds the range of 35% to 85% RH. c. Place where condensation occurs due to sudden temperature change. d. Place where atmosphere containing corrosive gas, flammable gas or organic solvent. e.

CRBB-OM00004

Table 1 Moment of inertia Size Allowable kinetic energy (J) 10 0.00015 15 0.00025 20 0.0004 30 0.015 40 0.03 How to calculate the load energy E : Kinetic energy (J) I : Moment of inertia (kg m Speed (rad/s) : Rotation angle (rad) 1803.14 rad t : Rotation time (s) 1 E = I 2 2 2 = t Table 2 Safety operable rotation time adjustment range Size Rotation time ( s / 90) 10 0.03 to 0.5 15