Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Pad Diameter: 50 (Flat+Flat with Ribs+Bellows+Compact+Compact with Ribs), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Rotating or Non-rotating: K (Non-rotating), Stroke: 20mm, Vacuum Entry: N01 (NPT 1/8), Mounting Thread: A14 (M14X1)

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: N01 (NPT 1/8, Side Ported Only), Actuator Type: 07 (Cross Roller Plunger), Suffix: S (Hard Steel Roller), Indicator: None

Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: N01 (NPT 1/8, Side Ported Only), Actuator Type: 07 (Cross Roller Plunger), Suffix: S (Hard Steel Roller), Indicator: None

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector),

Accuracy: Basic, Motor Mounting Position: L (Left Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: L (2.86mm), Stroke: 200mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/vent hole tap), Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped (Standard), Cable Type: S (Standard Cable), Cable Length

, Accuracy ±2% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

, Accuracy ±2% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 5 (ø4, Elbow)

101kPa, Accuracy ±1% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 1 (ø3.2, Straight)

101kPa, Accuracy ±1% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

, Accuracy ±2% F.S.), Air Pressure Supply, P Port: 0 (w/o Fitting, M3 x 0.5), Vacuum, V Port: 1 (ø3.2, Straight)

±2% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

100kPa, Accuracy ±2% F.S.), Air Pressure Supply, P Port: 0 (w/o Fitting, M3 x 0.5), Vacuum, V Port: 1 (ø3.2, Straight)

, Accuracy ±2% F.S.), Air Pressure Supply, P Port: 0 (w/o Fitting, M3 x 0.5), Vacuum, V Port: 1 (ø3.2, Straight)

100kPa, Accuracy ±2% F.S.), Air Pressure Supply, P Port: 0 (w/o Fitting, M3 x 0.5), Vacuum, V Port: 1 (ø3.2, Straight)

, Accuracy ±2% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

101kPa, Accuracy ±1% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

±1% F.S.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

2% F.S.), Air Pressure Supply, P Port: 0 (w/o Fitting, M3 x 0.5), Vacuum, V Port: 1 (ø3.2, Straight)