D

Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details. KE 12 3/8" 1/2" With One-touch fitting AS-FG Note) For applicable tubing O.D. selection, refer to the Model on page 734.

AS-FPQ/FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-X785

Port size on the valve side 6, 8, 1/8 6, 8 10, 1/4 8 10, 3/8 10 12, 1/2 Sonic conductance [dm3/(sbar)] 0.8 1.3 1.4 3.1 3.2 5.1 5.8 Critical pressure ratio 0.25 0.25 0.25 0.25 0.25 0.25 0.25 How to Order 2 200 S AS 01 X785 Pilot port Port size Body size Thread type Seal method 2 1/8, 1/4 3 3/8 4 1/2 Nil R, Rc G G Nil Without sealant (for G) S With sealant (for R) Cylinder side 01 1/8 02 1/4 03

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

How to Order 2 AW X2622 30 03 Option/Semi-standard: Select one each for a to d. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

How to Order E210/310/410 Series Modular Adapter

Modular Adapter How to Order E210/310/410 Series AC-A AF-A AF-A E310 03 U AR-A Size AL-A Piping port size 210 310 410 Size 310 Port size Uni thread AW-A Symbol 410 210 01 02 03 04 1/8 1/4 3/8 1/2 AC-B Thread AF-A Uni thread U AF-A AR -A -B Specifications AL-A Model E210 E310 E410 AW -A -B Port size 3/8 1/4 1/4 1/4 3/8 1/2 1/8 AW Piping I.D. 10 8 8 8 10 12 6 AG Fluid Air Ambient and fluid

High Precision Filter for Liquids FGH Series

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Element classification Note) Port size 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

FH150

(Including O-ring for element) 5 m 10 m 20 m Model FH150-02 FH150-03 FH150-04 Element size EP910-005N EP910-010N EP910-020N 55 x 90 Note 1) The symbol at the end of the element part no. indicates the hydraulic fluid type. N: Petroleum, V: Phosphoric ester, W: Water-glycol, Emulsion (10 m only) Note 2) Refer to page 528 for micromesh elements.

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

PA3000/5000

Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N 3 5 Body only With silencer 3/8 standard 1/2 standard For AIR EXH: AN200-02 Port size Material of body wetted areas 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread

Process Pump: Automatically Operated Type (Internal Switching Type) Air Operated Type (External Switching Type) PAF3000 Series

Type Rc NPT G Symbol Nil N F Port size Port size 3/8" Symbol 03 0 PAF341 P13 Tube extension Option Actuation Note 1) Applicable actuation Automatically operated Option Symbol Air operated Symbol 0 3 Actuation Automatically operated Air operated Nil B N None With foot With silencer Tubing size When option is more than one, suffix in alphabetical order.

Series PF2W Digital Flow Switch For Water

For Water Digital Flow Switch Series PF2W How to Order Integrated Display Type PF2W7 20 03 27 M Flow rate range Thread type 04 20 40 11 0.5 to 4 L/min 2 to 16 L/min 5 to 40 L/min 10 to 100 L/min Unit specifications Rc NPT G Nil N F With unit switching function Note1) Fixed SI unit Note2) Nil M Lead wire (Refer to page 322.)

ISG

Terminal thread type is M4. 0 W 1 03 1 0 ISG Mounting/Piping Caution Multipurpose pressure switch 1. Mounting is possible in either horizontal or vertical orientations. Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

JIS Symbol G Port size Symbol Port size Size 30 1/4 50 $ 60 75 100 02 03 04 $ Bracket Assembly (Accessory) Part No. $ $ $ $ $ 3/8 Part no. Applicable model BM64 BM65 $ $ $ 1/2 IDG30

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 1 to 10 l/min 10 4 With neon light (220 VAC, Green) 10 to 20 l/min Simple flow setting Without removing the cover, you can set with a screwdriver from the

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

PVQ10

Compact Proportional Solenoid Valve Series PVQ10 How to Order 13 03 M5 5 PVQ L A Base mounted Body / Seal material Valve type / /! & ! 13 A Voltage 5 6 $* ( Port size '$ ( 0 3 % 2 0 0-4 3 2 0 3 ') 5 ')1 $ " Electrical entry Nil 1 0 L /0-4 M5 % 2 0-4 5 + 0 M Orifice size 67 5 0 /!

VEX1

Example: VEX1333-03 G36-4-01 843