Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: None, End Lock: N (None)
Model: 31, Orifice: 1 (1.5mm), Style: 0 (N.C., Single Unit), Option: B (C37, Seals: EPDM, Class B), Suffix: Standard, Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)
Base Mounted Wiring: 01CU (Base Mounted Plug-in w/Multi-connector on U Side), Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)
Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 15 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8)
Model: 31 (4400 l/min [ANR]), Pressure Range: 3 (0.005~0.5MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 1 (Analog Output 1~5VDC), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: S (Straight Style 3m), Pressure Display Unit: 3 (Bar)
Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal), Surge Suppressor: L (w/Light), Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)
This is a legacy product, and replaced byVQ4201-31 VQ4000 VALVE, SOL 4/5-PORT. VALVE, SOL. VALVE. VQ4000 NO SIZE RATING. 0.44092 lb. 2E.
Model: 31, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: L (w/Light), Rectifier: None (for DC or AC Class H Coil)
Model: 31, Orifice: 1 (1.5mm), Style: 0 (N.C., Single Unit), Option: N (SS/Ag, Seals: FKM, Class H), Suffix: Standard, Port Size: 01 (1/8), Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: L (w/Light), Rectifier: None (for DC or AC Class H Coil)
Model: 31, Orifice: 1 (1.5mm), Style: 0 (N.C., Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: L (w/Light), Rectifier: None (for DC or AC Class H Coil)
Model: 31 (4.4 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: R (w/AC Adapter, w/o AC Cord), Bracket: B (w/Bracket), Automatic Cleaning Unit, Louver: Y (w/Automatic Cleaning Unit & Adjustable Louver), Filter: U (w/Filter)
base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .66138 lb. AJ.
Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: A (C37, Seals: FKM, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: L (w/Light), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)
Stations: 4 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: TAN (AS-i 8 in/out - 31 Slave Modes - 2 Power Supply Systems, -COM), Number of Input Blocks: 0 (w/o Input Block)
Model: 31 (4400 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 1 (Analog Output 1~5VDC), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: C (L Bracket), Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)
SI Unit: TAW (AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)
SI Unit: TAW (AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting)
SI Unit: TAW (AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)
SI Unit: TAW (AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply), Input Block Stations: None, Input Block COM: +COM, Stations: 5 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)
SI Unit: TAW (AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply), Input Block Stations: None, Input Block COM: +COM, Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)