V

i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n 1 2 3 4 5 6 7 8 9 10 L1 28

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz Note 7) L/min 28

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Axial piping type (P) Functional option IN OUT Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction Model 0.2 0.3 0.4 0.5 0.6 0.7 3 5 OUT 16 6 8 10 11 MXJ4 2 4.5 3 4 5 13 6 IN 8 9 6 8 11 28 14 OUT 17 20 MXJ6 3 6 4 6 8 21 11 IN 13 15 10 15 20 50 25 30 OUT 35 MXJ8 4 8 8 11 15 38 19 23 IN 26 Note) Theoretical output (N) = Pressure

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

+1.0 0 +1.4 0 +1.8 0 +2.2 0 Allowable stroke tolerance Both ends (Air cushion) Cushion JIS Symbol Double acting Port size G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 G 1/2 Basic, Axial foot, Rod end flange, Head end flange, Single clevis, Double clevis, Center trunnion Mounting Minimum Stroke for Auto Switch Mounting Standard Stroke Standard stroke (mm) Bore size (mm) Max. stroke Refer to page 28

Micro Mechanical Valve Series VM1000

F.O.F. 6.5 mm 1.7 mm 4.8 mm 21 N VHK 25 28 2 x 3.2 mounting hole 5 x 1/8 VH Push button (Flush) VZM550-01-33 Panel mounting hole VHS 38 23 T.T. O.T. P.T. VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

Process Valve Series VNA

(mm) Model Rc FlangeNote) Cv 7 12 11 18 11 18 19 28 19 28 29 43 29 43 Effective area (mm2) 130 220 210 320 210 320 330 500 330 500 520 770 520 770 VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 16 25 22 32 22 32 28 40 28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 4.1 4.2 1 2 1 JIS Symbol Valve

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Bore (mm) H I OA OB E F M N K L Q RA RB T Inch Inch Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 25 29 36 40 5 5 5.5 5.5 #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 15.5 20 25.5 28 3.5 3.5 5.4 5.4 32 38 47 52 #8-32UNC #8-32UNC #10-32UNF 1/4-28 UNF 3.5 3.5 4.5 5 5.2 6.2 8.2 10.2 12 16 20 25 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 For the following

Compact Cylinder

In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction 3-wire 2-wire Wiring type NPN PNP Output type IC circuit, Relay, PLC 24 VDC relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less 40 mA or less 2.5 to 40 mA Load current 0.8 V or less at 10

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ6-10Z 22 18 25 9 23 16 38 10 30 64.5 4 2 50 60 MXQ6-20Z 25 15 15 9 26 26 38 10 30 74.5 4 2 50 60 MXQ6-30Z 21 34 12 20 48 13 40 95.5 6 3 63 73 MXQ6-40Z 26 10 38 24 28 28 48 15 50 107.5 6 3 75 85 MXQ6-50Z 27 20 48 34 28 28 48 15 60 117.5 6 3 85 95 87 Air Slide Table/Height Interchangeable Type MXQ Series Dimensions: MXQ [Adjuster

3 Position Cylinder Series RZQ

52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 40 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 50 45 M16 x 2.0 84 130 102 21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5 19 63 9 3 Position Cylinder Series RZQ Foot type/RZQL Foot type (mm) B + Full stroke L Bore size (

ZPT/ZPX

1.5 125 125 B12 M12 x 1.75 B16 M16 x 1.5 Pad type Material HB Large bellows pad N NBR S Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-86 5 Series ZPT Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry without Buffer 63 80 63 80 ZPT HB-A14 (Male thread) ZPT HB-B (Female thread) M14 x 1 Rc 1/8 Hexagon width across flats 19 5 5 25 Hexagon width across flats 19 G 28

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

VDW VQ Proper tightening torque N m Tightening Torque for Piping LVM Connection threads 28 to 30 G, Rc 1/2 VCA 3. Be sure not to position the coil downwards. When mounting a valve with its coil positioned downwards, foreign objects in the fluid will adhere to the iron core leading to a malfunction. 28 to 30 G, Rc 3/4 36 to 38 G, Rc 1 VCB 4.

Air Gripper Unit for Collaborative Robots

Air supply .28 5-5. Piping .28 5-6. Operating environment .29 5-7. Lubrication .29 6. Maintenance .29 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Dual Rod Cylinder Series CXSJ/CXS

22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Ionizer Nozzle type IZN10 Series IZS

With L-bracket B1 With pivoting bracket B2 With DIN rail mounting bracket B3 Output specification Refer to page 450.

Speed Controller with Indicator

Number of pages increased from 12 to 28. SR Universal type added. Indicator window direction: 90 and 270 added. Number of pages increased from 28 to 36. TZ Edition B Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

34 45.1 [60.6] 21.6 28 34 [40.5] 31.1 31.1 15 21 21 25 25 10 10 97.6 18 18 97.6 [ ] for AC Other dimensions are the same as the grommet style

Compact Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch model In-line In-line Perpendicular Perpendicular Perpendicular In-line Electrical entry direction 2-wire 3-wire Wiring type PNP NPN Output type 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage 10 mA or less Current consumption 28 VDC or less 24 VDC (10 to 28 VDC) Load voltage 2.5