RHC

7.5 = 0.7 0.5 3000 9 10 0.1 0.3 500 2.5 1000 5 0 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax (mm/s) 2000 10 32 1/4 1/4 2500 3000 12.5 15 30 6 10 1/4, 3/8 = 0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1/4, 3/8 3/8 3/8 3/8 1500 2000 2500 3000 12 16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12

Electric Actuator/Slider Type

5000 2500 2500 0 0 0 10 20 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] 9 Model Selection Series LEFS This graph shows the amount of allowable overhang when the center of gravity of the workpiece overhangs in one direction.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

2500 0 0 0 1 2 3 4 0 2 4 6 8 10 Work load [kg] Work load [kg] LEFS25lV6A/Ball Screw Drive LEFS25lV6A/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2

id_idw_and_ida_series_air_dyers

Series ID/IDW/IDA Heatless Air Dryers High Capacity Heatless Air Dryer Series IDA 73 86 114 170 205 295 409 591 818 1136 1909 2273 2955 4091 lbs Kg Weight 160 190 250 375 450 650 900 1300 1800 2500 4200 5000 6500 9000 A B C inch mm inch mm inch mm 610 610 711 787 813 838 1067 1168 1245 1524 1575 1575 1219 1575 24 24 28 31 32 33 42 46 49 60 62 62 48 62 711 864 813 940 914 1041 1143 1448 1524

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.

High Power Cylinder:

REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:

15

LEFB40 (100%) 20 0 500 1000 1500 2000 2500 3000 Acceleration/Deceleration [mm/s2] 17500 Stroke [mm] * Cycle time is for when maximum speed. * Maximum stroke: LEFB25: 2000 mm LEFB32: 2500 mm LEFB40: 3000 mm 15000 12500 10 7500 5000 2500 0 0 5 10 15 20 25 30 Work load [kg] These graphs are examples of when the standard motor is mounted.

Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

ZL3-OM00801

7 15 PBT 2 POM 16 POM 2 3 PBT 17 PBT 4 POM 18 5 FKM 6 PBT 19 7 PBT 3 6 8 1 PBT 20 , 9 1 4 1 10 2 21 11 2 PBT 5 22 12 POM 8 13 3 O HNBR/NBR 16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500

VHS

1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !

MWB

100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500

HRX-OM-W002

Ambient temp. 3500 2500 2500 2500 2500 Ambient temp. Ambient temp. 3500 2500 2500 Ambient temp. Ambient temp. or 2500 or 2500 Ambient temp. Ambient temp. or or Ambient temp. or or Facility water temp. 3000 Facility water temp. or or Facility water temp. 3000 Facility water temp. or Facility water temp. Facility water temp. 2000 2000 2000 2000 Facility water temp.

Compact

T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation

3 Port Solenoid Valve Rubber Seal Series SY100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

442 491 491 OUT 25 10 82.4 124 165 206 247 288 330 371 412 412 IN 161 241 322 402 482 563 643 724 804 804 OUT 32 12 138 207 276 346 415 484 553 622 691 691 IN 252 378 504 630 756 882 1010 1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500

Thermo-chiller/Rack Mount Type

temperature [C] HRR018-A-10 -20, HRR018-W-10 -20 [50 Hz] [60 Hz] 2500 2500 25C 25C 2000 2000 Cooling capacity [W] Cooling capacity [W] 32C 1500 1500 32C 40C 1000 1000 40C 500 500 Ambient temperature or facility water temperature Ambient temperature or facility water temperature Ambient temperature or facility water temperature Ambient temperature or facility water temperature 0 0 0 10 20

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Electric Actuator

2500 0 0 0 5 10 15 20 Work load [kg] 0 5 10 15 20 Work load [kg] LEFS25S;A LEFS25/Ball Screw Drive: Vertical LEFS25S;B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 17500 17500 Duty ratio: 50% 15000 15000 12500 12500 10 10 7500 7500 Duty ratio: 75% 5000 5000 Duty ratio: 75% 2500 2500 0 0 0 2 4 6 8 Work load [kg] 0 5 10 15 Work load [kg] LEFS32S

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

SliderType /Slide Bearing Series NCYZS Gonstruction/Parts List NCDY2S25H Parts List External moving Grease name lvlaker Alvania Groase No.1 Alvania Grease No.2 Alvania EP Grase No.1 Alvania EP Grease No.2 Sunliqht Grease No.2 Sunlioht Gtease EM'l Sunli6ht Grease EPI Sunliaht Grease EPI sunlidht Greas6 EPz Grease lVlPl Grease MP2 Grease S1 Grease S2 Kosmo Oil Grsase No.1 Grease No.2 Multinoc

Ozone Resistant

discharge Industrial environment Semiconductor dry cleaner Industrial environment Electric dust collector A few ppm Reference: Shigeyuki Ota and Hironori Shimizu (Eds) Ozone Riyo no Riron to Jissai ("Theory and Practice of Ozone Use") Riaraizu Co., Inc., (1989) 8 List of Ozone Resistant Products 1: Standard (HNBR) Description Series Description Series ARM Pressure control valves 1000 2000 2500