CNG

4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

Slide Unit Series CX2/CXWM/CXWL

For dimensions of 25 stroke, refer to page 494. 493 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2 x M6 x 1.0 thread depth 12 Max. 201 2 x 2 x 6H7 depth 8 +0.012 0 2 x M10 x 1.0 Adjusting bolt 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) Max. 6 2 x RB1006 shock absorber (Single

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Air Slide Table

6 15.5 MXQR 6 6 7 2.5 19 8 7 M2.5 x 6 14.5 12.5 M2.5 x 8 7 8.3 M5 x 0.8 M 15 MXQR-CS 6-X11 25.5 5 MXQR-CS 8 18 B 7 8 3 22 9 MXQR 8 7.5 16.6 14.6 8 9.8 M6 x 1 15 MXQR-CS 8-X11 M3 x 8 M3 x 10 28 F 25 MXQR-CS 8-X12 38 5 MXQR-CS12 22 E G MXQR12 M8 x 1 M4 x 12 M4 x 12 9.5 12 4 29 14 11 20.5 18.5 11 13 15 MXQR-CS12-X11 32 C MXQR-CS12-X12 25 42 MXQR-CS16 5 23 Table mounting parts MXQR16 M10 x 1

0.55

1/4, 3/8 1/8 base model 5(R), 3(R) port 1/8 1/2 5(R), 3(R) port 5/3(R) port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold

KG

27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5 8 21.6 14.9 18.5 15.2 12 23 Applicable tubing 21.6 14.9 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 22 20.9 17 28.5 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101

CNG

4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS Long stroke CLS Description Material Note Component Parts No.

HRX-OM-M005

Appendix . 8-1 8.1 Specification . 8-1 8.1.1 Product specification . 8-1 8.1.2 Refrigerant with GWP reference . 8-8 8.1.3 Communication specification. 8-9 8.1.4 Alarm signal selection . 8-11 8.2 Outer Dimensions . 8-12 8.3 Flow Chart . 8-13 8.3.1 HRZD020-WS-WS, HRZD020-W1S-W1S, HRZD020-W1S-WS, HRZD020-WS-W1S . 8-13 8.4 Offset Function . 8-14 HRZD Series TOC--3 HRX-OM-M005 Table of Contents

5 Port Air Operated Valve

(For mounting) (26) 1/8, 1/4 [1(P)port] (18.4) 1/8, 1/4 [1 (P) port] (18.4) (18.4) VGA (18.4) (Distance between ports) (Distance between ports) 1/8 [5(EA), 3(EB)port] 1/8 [5 (EA), 3 (EB) port] VPA 1P 3EB 1P 3EB 8 VPA3 7.5 7.5 5EA 5EA 8 7.5 2 (Breathing hole) 36 2 x 2 (Breathing hole) 36 12.5 30.5 71 66 3 position closed center/exhaust center/pressure center VFA3 30(-P) 01 02 3 4 5 23 1/8

Stainless Steel 316

(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane KGW04-M5 KGW04-01 8 M5 0.8 32 38.5 18 30 37.5 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74

HRX-OM-W002

Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.2.4 Inspection every 6 months . 8-8 8.3 Stop for a Long Time . 8-9 8.3.1 Discharge of the circulating fluid . 8-9 8.3.2 Discharge of the facility

Series KP/KPQ/KPG

1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

Series KP/KPQ/KPG

1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

KP/KPQ/KPG

1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Modular Type Air Filters Series AF

Note 8) Note 8) Note 8) Note 8) Note 8) Note 8) AV Note 4) Refer to Chemical Data on page 287 when selecting a case material.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

6: 20; 8-8: 15, 8-10: 10 8-6: 5; 8-8: 5, 8-10: 5 Max. operating frequency (cycle/sec) 8-6: 10; 8-8: 10, 8-10: 20 8-6: 3; 8-8: 3, 8-10: 2 Lubrication Not required Manual override Non-locking push type Enclosure Dusttight Coil rated voltage 100 VAC, 110 VAC, 200 VAC, 220 VAC, 24 VDC Allowable voltage range (%) 15 to +10% of rated voltage Coil insulation Class B or equivalent 50 Hz 5.6 Apparent

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

REA/REB

8 @2 !7 @6 #1 #0 @8 !0 @9 !1 #2 i !6 @3 @1 @5 @4 @0 REAS10 Parts list Parts list No. Description No.

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.