Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

[74] 51.6 35 27 8 A A 24 (Pitch) P=19 1/8 (A port) 21 Other dimensions are the same as type 42.

Micro Mechanical Valve Series VM1000

roller 45.5 29.2 (A) 2 Symbol 2 port 8 R port (3 port only) P.T.

Air Slide Table

8 MXQR12 MXQR16 MXQR20 MXQR25 ( ) The MXQR6 series does not have a shock absorber type (J, JS, JT).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 135 +8 0 +8 0 +6 0 +4 0 +4 0 80 80 180 , 225 B port A port B port A port CRBU2 100 100 Start of rotation is the position of the key when B port is pressurized.

Table of Contents

, 135 +8 0 +8 0 +6 0 +4 0 +4 0 80 80 180 , 225 B port A port B port A port CRBU2 100 100 Start of rotation is the position of the key when B port is pressurized.

Fieldbus System

L3 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" [External pilot] One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 8, 5/16" 42.3 7.4 (Station n) (Station 1)-(Slide locking manual override) BUS OUT 1 P 1 P X PE 76.7 68.8 63.1 10.6 13.6 BUS IN B A B A 56.6 14 A 14 A E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR 4 A 4 A 4 A 4 A 4 A 21.6 18

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 135 +8 0 +8 0 +6 0 +4 0 +4 0 80 80 180 , 225 B port A port B port A port CRBU2 100 100 Start of rotation is the position of the key when B port is pressurized.

HRX-OM-X071

water (Water-cooled type) .8-12 8.4 Replacement of consumables . 8-14 8.4.1 Replacing Particle Filters .8-14 8.4.2 Replacing the DI filter (Option DM) .8-14 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR050-A/W*-20-* .8-16 8.5.2 HRR050-A*-40-* .8-18 8.5.3 HRR050-W*-40-* .8-19 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR050-A-. 9-1 9.1.2 HRR050-W-. 9-3 9.1.3 Refrigerant

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Rc 3/8: Rc 3/8 thread C8: One-touch fitting for 8 C10: One-touch fitting for 10 C12: One-touch fitting for 1 2-Rc 1/8 (External pilot port) 3.5 163 Connector location on U side (FU) 44 62 9 9 73 U side 15 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Air cylinder

D-F59F D-A59W D-F5NT D-P3DWA Bore size A B A B A B A B 32 10.5 7 8 4.5 15.5 12 9.5 6 40 10.5 10.5 8 8 15.5 15.5 9.5 9.5 50 12 11 9.5 8.5 17 16 11 10 63 13 12 10.5 9.5 18 17 12 11 80 18 14.5 15.5 12 23 19.5 17 13.5 100 18 15.5 15.5 13 23 20.5 17 14.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 18 Table 6 (mm) Support bracket other than Center

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

CG1

B A B A B A B A B A B HS HS HS 20 9 3 6 8 6.5 4.5 24.5 27 27.5 20.5 14.5 17.5 19.5 18 16 25 9 3 6 8 6.5 4.5 27 29.5 30 20.5 14.5 17.5 19.5 18 16 32 10 4 7 9 7.5 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 19 17 40 14.5 8.5 11.5 13.5 12 10 35 37.5 38 24 18 21 23 21.5 19.5 50 17 11 14 16 14.5 12.5 40.5 43 43.5 28.5 22.5 25.5 27.5 26 24 63 17 11 14 16 14.5 12.5 47.5 50 50.5 28.5 22.5 25.5 27.5 26 24

4/5 Port Air Operated Valve Series SYJA3000

+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

HRX-OM-M090

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

HRX-OM-W038

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility