VVX31/32/33

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

39

8 t Rubber cover !0 q e !1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

MRHQ

Port B 4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A Side B 12-11-15 16 Series MRHQ Dimensions MRHQ25 A 70 58 B 93 4-M6 x 1 depth 10 47 64 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

IDX-OM-V020

. 7-5 Chapter 8 Option A . 8-1 8.1 SAFETY INSTRUCTIONS FOR USE . 8-1 8.2 SPECIFICATIONS . 8-1 8.3 AIR PIPING . 8-1 8.4 AIR FLOW CAPACITY . 8-1 8.5 AIR/ REFRIGERANT CIRCUIT . 8-2 Chapter 9 Option C . 9-1 9.1 SPECIFICATIONS . 9-1 9.2 PRECAUTIONS FOR INSTALLATION AND HANDLING . 9-1 Chapter 10 Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

30 1 M10 x 1.5 x 8 L (Hexagon socket set screw) 2 x 11 counterbore depth 6.3 36 Z 1 750.2 750.2 76 44 98 96 6.3 5 16 18 M8 x 1.25 x 23 L and M8 x 1.25 2 x M6 x 1 (Through-hole) 2 x M5 x 0.8 thread depth 8 (Hexagon bolt) (Hexagon nut) M8 x 1.25 x 16 L (Hexagon socket head cap screw) 8 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) 2 x M5 x 0.8 thread depth 4.5 Note) (Z) 30 (Opposite side

Air/Manually Operated High Purity Chemical Valve Series LV

A B A B Non-locking Locking Threaded Type LVH20 4 LVH30 8 LVH40 12 Model Orifice diameter Material SUS316 PPS PFA 1/4 3/8 3/8 3/8 SUS316 PPS PFA 3/8 1/2 1/2 1/2 SUS316 PPS PFA Port size 1/8 1/4 1/4 1/4 Symbol Type Basic type Valve type N.C. A B A B Non-locking Locking Manifold (5 stations max.)

High Pressure Coolant Valve

1.2 1.6 2.4 2.2 3.1 5.8 8.7 1.6 3.1 3.9 6.8 0.5 1.0 1.4 2.1 1.9 2.7 5.0 7.5 1 8 1 4 1 8 1 4 1 8 1 4 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

,

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override

Hand Valve Series VH

(R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH43l-02 to 04 (Bottom piping) VH43l-06 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

Rotary Gripper Series MRHQ

4-M6 x 1 Depth 10 I N J E A D P A A M N R SMC R E O P 17 P T 21.5 27.5 A I R R G Y 7 R A I 8 17.5 32 8 42 Side A Side B Scale: 40% 12 Rotary Gripper Series MRHQ Construction Description Material Note Parts list No.

Lightweight and Compact

k HECR 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit HEC 10 Alarm status signal output Contact output signal 3 2 HEB 9 Remote status signal output Contact output signal 2 1 8 HED Operation status signal output Contact output signal 1 0 HEA * The pin numbers and output signals can be set by user.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

1 !2 !3 !4 !5 !6 !7 !8 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

1 !2 !3 !4 !5 !6 !7 !8 !

LEKF-OMZ0035

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1 (in case with driver) (3) Motor cable 1 (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1 (in case with I/O connector) (2) Driver *2 1 (3) Motor cable (4) Encoder cable (5) Lock cable 24VDC Host controller, (1) Electric Actuator etc (6) I/O connector 2 *1 This picture is LECSA *2 The shape

AC Servo Motor Driver (MECHATROLINK-III type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYU Operation Manual (Simplified Edition),section 4.4.1.