after R thread installation R1/4 L [mm] Part no.
input and controling GW 24 VDC GW unit 4 2 3 7 8 Accessory No.
Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.
Model Orifice size Port size Material Body Seal 4.5 mm 10 mm 6 mm 8 mm 3 mm 2 mm VX21 1/8, 1/4 NBR 1/4, 3/8 Brass Stainless steel VX22 FKM 1/2 EPDM 1/4, 3/8 VX23 PTFE 1/2 Normally Open (N.O.)
Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
Note 3) The unit % F.S. is based on the full scale of analog 4 V (1-5 V). Note 4) 0 kPa indicates the atmospheric release.
180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL.
9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.
Description Wire 2 DC(-) Blue cable 3 CH1_OUT1 Black 1 DC(+) Brown 4 N.C. White 2 N.C. 5 CH2_OUT1 Grey 3 DC(-) Blue 6 CH3_OUT1 Red 4 Sensor input (1 to 5 V) White 7 CH4_OUT1 Green 8 N.C. Yellow with PF3W5 Pin no.
screw 2 22 Seal washer 2 21 Parallel pin 1 20 Hexagon socket head set bolt 4 6pcs. for size 3, 7 19 Round head Philips screw No.0 4 Round head Philips screw High precision type 18 4 Round head Philips screw Size : 7 Round head Philips screw No.0 Size : 1 to 3 17 Special bearing 1 High precision type Deep groove ball bearing Basic type 16 Deep groove ball bearing 1 15 Piston seal 4 14 Wearing
11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18
Assembly 1) Terminal block (3) connected with housing (4) should be reinstated.
Output supply current EX126D-SMJ1 16 outputs 1.4 A EX250-SDN1, -SMJ2, -SPR1, -SCA1A, -SEN1 32 inputs / 32 outputs 2 A EX250-SAS3 8 inputs / 8 outputs 2 power supply systems 0.5 A EX250-SAS5 4 inputs / 4 outputs 2 power supply systems 0.25 A EX250-SAS7 8 inputs / 8 outputs 1 power supply system 0.24 A (Total of inputs / outputs) EX250-SAS9 4 inputs / 4 outputs 1 power supply system 0.12 A
(no condensation) Temperature characteristics 5%F.S. max. (0 to 90 C, 25 C reference) Withstand voltage 1000 VAC, for 1 minute between the external terminals and case Insulation resistance 50 M or more (at 500 VDC) between external terminals and case Standards and regulations CE, RoHS Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Materials of parts in contact with fluid SUS, NBR 4,
Auto switch operating range (mm) Bore size (mm) Auto switch model 20 25 32 40 50 63 80 100 D-A9(V) 9 9 9 9.5 9.5 11 10.5 10.5 D-M9(V) D-M9W(V) 5.5 5 6 5.5 6 6.5 6 7 D-M9A(V) D-Z7/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y5/Y6 D-Y7P(V) 7.5 7 6.5 6 7 8 9.5 10 D-Y7W(V) D-Y7BA D-P3DWA 5.5 6 6.5 6 6.5 6 6 D-P3DW 6 5.5 5.5 5.5 6.5 7.5 7.5 D-P4DW 5 4 4 5 4 4 * Since this is a guideline including
L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 12 Position for application of grease Table 9 Amount of grease A units: g Stroke 32 40 50 63 80 100 125 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 15 to 17 50st added 1 1 1 1.5 2 3 3 28 3-2-4.
105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 Note) NPT thread is also available.
Note 4) Air is normally being discharged to the atmosphere.