Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.07～1, Cushion: None, Specification: Built-in magnet, Support bracket:

SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Single acting, single rod, compact cylinder , Bore sizes *: 12, 16, 20, 25

SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Single acting, single rod, compact cylinder , Bore sizes *: 12, 16, 20, 25

SI Unit

15 Date Signature (creator) Date Signature (test engineer) 46 No.EX##-OMY0011-A Appendix D: Safety Characteristics Operation Value Item SFF >90% HFT Hardware Fault tolerance 1 PFH Probability of dangerous failure per hour <1 FIT Hardware classification Type B Safety Level SIL3 / PL e Mission Time 20 years 47 No.EX##-OMY0011-A Appendix E: EX260-FPS Timing Values Typical timing values of SMC

Digital Flow Switch ( compatible)

(Refer to the table below) Default setting Model (Output specification) OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA L PNP L2 PNP PNP L3 PNP Analogue 1 to 5 V L4 PNP Analogue 4 to 20 mA -35No.PF-OMZ0002-A [F 0] Selection of reference condition, unit selection function, switch output specifications.

4-channel Flow Monitor ( compatible)

Remarks Power supply/output cable ZS-26-L Length 2 m For PF2A5##, PF2W5##, PF3W5## Connector for sensor lead wire (e-con) ZS-28-CA-4 1 pc., Finished outside diameter: 1.15 to 1.35 Cover colour: Blue For PF2D5## Connector for sensor lead wire (e-con) ZS-28-CA-2 1 pc., Finished outside diameter: 0.9 to 1.0 Cover colour: Red Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof

Digital Flow Switch (Remote type monitor unit)

E: Contents revised in several places. F: Contents revised in several places. G: Contents revised in several places. [July 2018] H: Contents revised in several places.

PF-OMN0011_C

[F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

HRX-OM-W069

Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

HRX-OM-Z015

Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

High Vacuum L Type Valve

C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.