m(150 mesh)149 ?m(100 mesh)74 ?m(200 mesh)105 ?m(150 mesh)149 ?m(100 mesh)FH990-08/10EM620-074NEM620-105NEM620-149NEM330-074NEM330-105NEM330-149N?82 x 133

m(150 mesh)149 ?m(100 mesh)74 ?m(200 mesh)105 ?m(150 mesh)149 ?m(100 mesh)FH990-08/10EM620-074NEM620-105NEM620-149NEM330-074NEM330-105NEM330-149N?82 x 133

m(150 mesh)149 ?m(100 mesh)74 ?m(200 mesh)105 ?m(150 mesh)149 ?m(100 mesh)FH990-08/10EM620-074NEM620-105NEM620-149NEM330-074NEM330-105NEM330-149N?82 x 133

Depending on the model, flow capacities are available from 150 to 16100 CFM. 

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External Feedback Lever (IP5000 type) Stroke Order Code Unit Number Size M Size N P378010-11 150 125 10~85 mm (Nil) P378010-12 195 110 35~100 mm (E) P378010-13 275 110 50~140 mm (F) DIMENSIONAL DRAWINGS S E R I E S I P 5 0 0 0 / I P 5 1 0 0 IP5000 TYPE: LEVER TYPE LEVER FEEDBACK IP5100 TYPE: ROTARY TYPE CAM FEEDBACK IP5100 TYPE: NAMUR ADAPTER PLATE (Part Number: PAP5100-3) NAMUR MOUNTING

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

25

approximately 0.4 MPa. 0.7 0.7 0.7 SUP = 0.7 MPa PA 0.6 0.6 0.6 Discharge pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa PA(P) SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa PAX 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 PB PB 0.1 0.1 0.1 PAF 0 0 0 50 100 150

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

AK1000

intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections (Inletq, Outletw) Delivery pressure Delivery pressure 5 to 150

AZ1000

Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard Nil P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

CYV

Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) MG 15, 32 CX DSpecifications -X 15 32 Bore size (mm) 20Atmosphere to 1.3 x 10-4 Pa (ABS) Operating environment pressure Air/Inert gas Operating atmosphere Data Air/Inert gas Fluid

Bag Filter FGF Series

FN Number of elements Nominal filtration accuracy Note) Element size Number of elements 1 pc included (FGF1) 3 pcs included (FGF3) 5 pcs included (FGF5) Symbol 1 3 5 EB ES Element material (Polyester) Symbol Nominal filtration accuracy (m) Element size 190 x L440 190 x L770 Symbol A B 005 010 025 050 100 5 10 25 50 100 Port size Port size Rc2 100(4B)JIS10KFF 150(6B)JIS10KFF Applicable model

FH99

(Including O-ring for element) FH FH With relief valve Without relief valve Model Element size 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-105N EM620-105N EM720-105N EM820-105N EM920-105N

G15/G27

Symbol Outside diameter 15 15 27 26 Max. display pressure Symbol Unit 1.0 MPa 1.0 MPa, 150 psi 10 (1) P10 (1) (2) Note 1) Pressure other than 1.0 MPa is not available. Note 2) This symbol must be used with Option X30. 645

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series RoHS How to Order 100 A 20 HRS Option Cooling capacity 100 10 kW 150 15 kW Cooling method Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note) With uid ll port A Air-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT

C (swivel elbow type -5 to 150?C).??With their?stainless steel 316 construction and unique non-rubber seal insert connection, these grease-free fittings offer high levels of corrosion resistance, and can be used with numerous piping materials including FEP, PFS, soft and regular nylon, polyurethane and polyoelfin.?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

temperature of 25 3C) Display accuracy Operation indicator light Lights when ON, OUT1: Green, OUT2: Red Enclosure IP40 Ambient humidity range Operating/Stored: 35 to 85% RH (with no condensation) Environmental resistance Withstand voltage 1000 VAC for 1 min. between live parts and case 50 M or more (at 500 VDC) between live parts and case Insulation resistance Vibration resistance 10 to 150