s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

VXD21/22/23

Z S L, Z PB Thread AC 1 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

VXF

Air tank 70l PA=0.7 MPa Tube length L (mm) 6 x 10 pcs. How to read the graph The longer the tube length, the longer the response time and wasted time.

RB/RBL/RBQ

Cap Cap bracket RE A B REC CX CY MQQ M (mm) Model Basic type With cap With cap Basic type dimensions Hexagon nut RHC a 6 7 H 2.7 2.7 F D M10 x 1.0 M10 x 1.0 E1 3 3 E2 L LL S E3 LL Z B C h MM RBL1006 RBL1007 RBLC1006 RBLC1007 1.4 1.4 8.8 8.8 8.6 8.6 43.8 43.8 57.5 58.5 51.5 51.5 8.7 8.7 67.5 68.5 10 10 14 14 16.2 16.2 4 4 MK(2) Note) L, LL and S dimensions of RBL(C)1007/1006 are different

MXU

MG Lateral Mounting (Body tapped) CX D-X Front Mounting l1 l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M4 x 0.7 2.5 12.7 9.4 20M5 x 0.8 5.1 15.6 11.2 M5 x 0.8 5.1 20.6 16.2 Data Vertical Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening

Silencer Series AN

S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more Ambient & Fluid Temperature 5~60C / 40~140F H O W T O O R D E R SERIES NAN SILENCER Model Port Size* NPT

ZM

Electrical entry G H L LN LO Nil Grommet type, with 0.3 m lead wire (applicable to DC) Grommet type, with 0.6 m lead wire (applicable to DC) L plug connector, with 0.3 m lead wire L plug connector, without lead wire (applicable to DC) L plug connector, without connector (applicable to DC) Air operated/Without valve Pilot valve DC: 1 W (With indicator light: 1.05 W) DC: 0.45 W (With indicator

Series IRV10/20 Vacuum Regulator

Vacuum Regulator Series IRV10/20 RoHS How to Order Standard connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G Note 3) ZN ZP ZA ZB With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output

Clean Exhaust Filter SFE Series

Max. ow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch tting type Specications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum ow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating Note

KA

(mm) L M Weight (g) D Model 2-applicable tubing KAH23-00 31.5 32.5 34.5 18.5 21 22 4 3.2 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 46.1 46.1 29.5 29.5 18.0 18.0 4 3 3 KAH04-00 KAH06-00 13.1 13.1 5.6 5.6 3.4 2.9 8 6 KAH08-00 38.5 42.5 44.5 6 11 KAH10-00 12 10 KAH12-00 14 Different Diameter Straight: KAH Applicable tubing O.D.

PEEK

Series LVM CAT.ES70-30B Meeting the most advanced needs of process control Compact Direct Operated 2/3 Port Compact Direct Operated 2/3 Port Valve chamber volume Unit: l LVM09/090 LVM10 (For LVM11) LVM10/100 LVM15/150 LVM20/200 Series 18 11 20 50 84 Valve chamber volume Change in volume depending on open/closed status of valve (pumping volume) 0.01 l or less (Rocker type) Pumping volume

Compact Cylinder/Standard Type: Double Acting, Single Rod

Basic style Rod seal Piston seal NBR CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS 12 16 20 25 CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS Tube gasket Long stroke CQSB12-L-PS CQSB16-L-PS 12 16 20 25 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS Set of left nos. !5, !6, !7. CQSB25-L-PS CQSB20-L-PS Seal kit includes !5, !6, !7. Order the seal kit, based on each bore size.

: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)