SMC Corporation of America
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2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

the total amount of vertical deflection NC D X 2 N N O O F A U T O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock

Note 2) The material for seals and bumpers of CJ5SV is FKM. 836 Stainless Steel Cylinder Series CJ5-S Dimensions Basic style (B): CJ5BS R V NDh8 GA "# # "# # GB MM NN CA CB BA BB F NA NB A With head cover port in axial location (R) S $ % & BB H BA Z $ % & A BA BB CA CB D F GA GB H MM NN NA NB NDh8 S Z 10 16 Axial foot style (L): CJ5LS R V CA BA BB ,+( GB GA F NN MM '( )*+ "# # BA "

Note 2) in part numbers for a round-type pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT. The G thread is unavailable. If it is required, select the R thread type (Nil) instead. Please contact SMC regarding the pressure gauge supply for psi unit specifications.

Note 2) in part numbers for a round-type pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT. The G thread is unavailable. If it is required, select the R thread type (Nil) instead. Please contact SMC regarding the pressure gauge supply for psi unit specifications.

Auto switch capable CA2 Construction CS1 CS2 q w e r t y u i o !0 !5 !6 !7 !8 !9 @0 @1 @2 @3 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts No.

Note 1) The same bracket is used for VCS3 and VCS4 (port size 1/2). 17-2-44 7 Series VCS Direct Operated 2 Port Solenoid Valve For Steam Dimensions Grommet:G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 A B H 2-P 2-M Thread depth N 2-M Thread depth N VX Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

VHS2500 VHS3500 VHS4500 VHS5500 Model 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 1 1(P)/2(A) Piping port 1/2 1/4 1/8 3/8 3(R) 110 (6.11) 130 (7.22) 16 (0.89) 31 (1.72) 10 (0.56) 14 (0.78) 22 (1.22) 38 (2.11) 57 (3.17) 1(P) 2(A) Effective area (mm2) (Cv) 2(A) 3(R) Combination with a modular style FRL is possible. 33 (1.83) 40 (2.22) 14 (0.78) 29 (1.61) 11 (0.61) 16 (0.89) 15 (0.83) 29 (1.61) 51 (2.83

9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-

84 Release flow adjusting needle 2 x 4.2 (Mounting hole) A 2 2 Rc 1/8 Vacuum pressure supply port (PV) ZCUK 1.2 AMJ 41 Adapter G Bracket A Bracket A AMV Rc 1/8 Vacuum port (V) 7.2 1 AEP ZR100-K1 M -D HEP A B Related A B S Equipment A B Digital pressure switch for vacuum + + + PE A (79.8) PD 85 PS 60 PV 129 (2000) Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer

x E Mounting hole Port indication 2 x Rc1/4 Y 44 T Q G1/2 3 1 A A C D B B L L2 L 12 L1 U M D side Stations n U side 1 2 3 4 5 300 280 X V R S 2 x E Mounting hole H L K J L (mm) n (stations) Model Dimension 3 168 156 218 200 4 204 192 264 246 5 240 228 310 292 6 276 264 356 338 7 8 348 336 448 430 9 384 372 494 476 10 2 L1 L2 L1 L2 96 84 126 108 132 120 172 154 312 300 402 384 VVX31 VVX32

Valve side exhaust 493 XMH, XYH Series Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMH-16 XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF

A P2 R P1 0.5 s or more R P2 No output A A 2 Series VR51 Dimensions 70 45 (18) 4.9 Supply port P1(11) Flame resistant One-touch fitting: 6, 1/4 Exhaust port (with silencer) R(4) 10 26 9 27 Supply port P2(12) Flame resistant One-touch fitting: 6, 1/4 Output port A(2) Mounting thread 11.5 22 Flame resistant One-touch fitting: 6, 1/4 2-M5 x 0.8 Thread depth 5 45 Mounting thread 2

From this point horizontally draw a line, which indicates a rotation time of 2.2 sec/90'. Set the operating speed slower than 2.2 sec/90" How b Calcdate Enqgy ot tr Lod ,=L, r,.t E: Kinetic eneruY (in'lbs) 2 J: Mornerf of inertia(in.lbs.s1 ,":?! * r,: Rotation speed (radls) t ,:FMjon(rad) 18O':314 rad t : Flotation time (s) c) Series:NCRAI J: i/bnent of inrtia irFlb6?

Flow Characteristics With DIN terminal block Port size Flow characteristics With terminal block 1 2 (P A) b Cv C [dm 3/(sbar)] 2 3 (A R) b Cv C [dm 3/(sbar)] 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) Ground