5 Port Solenoid Valve

Series Rubber seal VQC4m01 7.3 6.4 Sub-plate Metal seal VQC5m00 14 11 VQC 5000 Series Rubber seal VQC5m01 17 13 Metal seal VQC4m00 6.9 6.3 VQC 4000 Series V V V V V Page 614 Page 614 Page 614 Page 614 Page 614 Rubber seal VQC4m01 7.3 6.4 Base Mounted Metal seal VQC5m00 14 11 VQC 5000 Series V V V V V Page 652 Page 652 Page 652 Page 652 Page 652 Rubber seal VQC5m01 17 13 Note) A separate

Fieldbus System

Note) Except SI Unit Manifold Solenoid Valves Manifold Solenoid Valves Series SY3000/5000/7000 Series SV1000/2000/3000 Series S0700 Series VQC1000/2000/4000/5000 IP67 IP40 IP67 IP67 Note) The SY3000/5000/7000, S0700, and VQC1000/2000/4000/5000 are not UL-compatible.

Fieldbus system EtherNet/IP compatible SI Unit

(Data format: scale conversion format) E.O. set value W.S. set value Expected value 0 to 32767 0 to 32767 +0 to +32767 32768 to 65535 -0 to -32767 -0 to -32767 Example: To set the Fault Value to 4 V when the range is 1 to 5 V (analogue output range), scale upper limit 5000, and scale lower limit 1000, set 4000 to Fault Value using the PLC. -66No.EX-OMZ0024 Analogue I/O unit parameters (1)

EXxx-OMQ0016

PLC settable value: 0 to 32767 Converted value +0 to +32767 PLC settable value: 32768 to 6553 Converted value -0 to -32767 Example: To set the Fault Value to 4 V when range is 1 to 5 V (analogue output range), scale upper limit 5000, and scale lower limit 1000, set 4000 to Fault Value by PLC. -50No.EX-OMQ0016 Analogue I/O unit parameters (1) Parameter Parameter setting No.

HRX-OM-K003

HRW002-H1 HRW008-H1 HRW015-H1 HRW030-H1 HRW002-H2 HRW008-H2 HRW015-H2 HRW030-H2 HRW002-HS HRW008-HS HRW015-HS HRW030-HS HRW002-H1S HRW008-H1S HRW015-H1S HRW030-H1S HRW002-H2S HRW008-H2S HRW015-H2S HRW030-H2S 4h 2h 1h 30min 20min 14min 10min 6min 4min 2min 1min MAX 30s 20s Operating Time 10s 5s 2s MIN 1s 0.5s 0.2s 0.1s 0.05s 0.02s 0.01s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000

Table of Contents

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

HRX-OM-X027

for low pressure Press sensor Ventilation Ventilation for outlet Pump Expansion2 Filter Drain port Press sensor Expansion1 for high pressure Fig 9.3-1 Flow Chart (HRS050-A-20--R ) 9.3 Flow Chart HRS-R Series 9-6 HRX-OM-X027 Chapter 9 Documents 9.4 Cooling capacity 7000 7000 6000 6000 Ambient 25oC Ambient 25oC 5000 5000 Cooling Capacity [W] Cooling Capacity [W] Ambient 32oC Ambient 32oC 4000

HRX-OM-R016

4000 Ambient Ambient 3500 3500 temperature temperature or or Cooling capacityW Cooling capacityW 3000 3000 facility water temperature facility water temperature 2500 2500 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option

HRX-OM-W038

4000 3000 25 25 3000 32 32 40 40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-O021

4000 25 25 3000 3000 32 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32

HRX-OM-R005

4000 32 3000 3000 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz

energy saving effect

radiation amount/Facility water specifications> 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000

Vacuum Unit Ejector / Vacuum Pump System

. -30 -20 -10 0 0 1000 2000 3000 4000 5000 6000 Piping length [mm] mm Fig. A. Vacuum pressure for piping (ZK215) Tube TU0805 or T0806 Tube TU1065 or T1075 Nipple KQ2N08-99 Straight type of different diameter KQ2H08-10A Fig. B Example of piping -74No. ZK2-OM01301 In addition, the exhaust port should not be blocked or pressurized.

AC Servo Motor Driver (Pulse input type/Positioning type ）

SPECIAL ADJUSTMENT FUNCTIONS (b) Switching timing chart Command pulses Droop pulses Command pulses +CDL Droop pulses [pulse] 0 -CDL After-switching gain 63.4% Before-switching gain Gain switching CDT = 100 ms Load to motor inertia ratio 4.00 10.00 4.00 10.00 Position loop gain 120 84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 3) When the

HRX-OM-W002

Ambient temp. 2500 2500 2500 2500 4000 4000 Ambient temp. or or Ambient temp. Ambient temp. Ambient temp. 2500 2500 Ambient temp. Ambient temp. 2500 2500 or Facility water temp. Facility water temp. Ambient temp. 3500 or or or 3500 or or 2000 2000 2000 2000 Facility water temp. Facility water temp. or Facility water temp. Facility water temp. Facility water temp. Facility water temp.

High-precision Digital Pressure Switch ( compatible)

-58.02 [Calculation example] (1) Conversion from the process data to the pressure measurement value (For ISE70 series, unit specification MPa and PD = 2000) Pr = a (PD) + b = 0.00025 2000 0.25 = 0.25 [MPa] (2) Conversion from the pressure measurement value to the process data (For ISE70 series, unit specification MPa and Pr = 0.75 [MPa]) (PD) = (Pr b) / a = [0.75 (0.25)]/0.00025 = 4000

High-precision Digital Pressure Switch

580.15 [Calculation example] (1) Conversion from the process data to the pressure measurement value (For ISE70G series, unit specification MPa and PD = 2000) Pr = a (PD) + b = 0.00025 2000 0.25 = 0.25 [MPa] (2) Conversion from the pressure measurement value to the process data (For ISE70G series, unit specification MPa and Pr = 0.75 [MPa]) (PD) = (Pr b) / a = [0.75 (0.25)]/0.00025 = 4000

High-precision Digital Pressure Switch ( compatible)

-1813 [Calculation example] (1) Conversion from the process data to the pressure measurement value (For ISE79S series, unit specification MPa and PD = 2000) Pr = a (PD) + b = 0.0125 2000 12.5 = 12.5 [MPa] (2) Conversion from the pressure measurement value to the process data (For ISE79S series, unit specification MPa and Pr = 37.5 [MPa]) (PD) = (Pr b) / a = [37.5 (-12.5)] / 0.0125 = 4000

AC Servo Motor Driver (Pulse input type/Positioning type)

(<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 90 180 360 629 90 180 360 Home position return/JOG operation Accelerationeration/D eceleration time constants (msec) PE07 100 1000 500 250 143 1000 500 250 Home position return position data (m) PE08 0 -4000

Mechanically Jointed Rodless Cylinders

Guide for Using MY3M Side Support 200 (1200) 180 160 m 140 Weight W (kg) 120 MY3M63 l 100 (800) 80 MY3M40 60 (700) m l 40 MY3M25 (600) m 20 MY3M16 0 1000 2000 3000 4000 0 l l Support spacing l1 (mm) Note) A side support must be used to keep the spacing from exceeding the value inside the parentheses.