VBA-OM-S009

VBA2: Tightening torque: 22 to 24 Nm (R3/8) VBA4: Tightening torque: 28 to 30 Nm (R1/2) (3) Change of the booster regulator OUT port plug VBA2, 4: Tightening torque: 24 Nm (M10) booster regulator by applying the seal tape. with a monkey spanner. Booster regulator Air tank Groove O-ring (4) O-ring

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

Finger Valve

Replacement parts Model One-touch fitting Applicable tube O.D. 10 or more 1(P)Male thread / 2(A)Male thread port R3/8 or larger One-touch fitting Applicable tube O.D. 8 or less Description Component No.

VBA-OM-S001

OUT port Mounting VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) Drain port Rc1/4 (4) O-ring : Mount the O-ring in the groove on the joint of the tank at the back of the booster regulator.

VBA-OM-S008

There should be no damage or dust for VBA1 is with nominal size 4 and 6, for VBA2 with : Tighten the optional safety valve and drain (3) (2) (1) (4) Booster regulator VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) VBA1 VBA2 (3) Change of the booster regulator OUT port plug valve with a monkey spanner. booster regulator by applying the seal tape

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11 LQ3T5A-R12 LQ3T6A-R1 LQ3T6A-R2 LQ3T6A-R3 LQ3T6A-R4 LQ3T6A-R5 LQ3T6A-R6 LQ3T6A-R7 LQ3T6A-R9 LQ3T6A-R10 LQ3T6A-R12 LQ3T6A-R13 LQ3T6A-R14 Applicable tubing O.D. 1

XM, XY

part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following

Industrial Filter

(Port size: R3/4) OUT of filtered fluid (Port size: R1 or R2) DRAIN Port to discharge all fluid when replacing the element. (Port size: R3/4) Table 1. Description and function of parts No.

Low torque Metal seal type Rotary joint

R3 3 (29) 32 ( 35) 29 5 37 (45) 5 MQR8-F MQR12-F 4-6 counter bore 5 4-3.2 through P.C.D.48 4-8 counter bore 5.5 4-4.5 through32 drill through 4-4.5 through 2-4.2 through 3 *at 2 points 27 drill through 45 25 R4 R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

S Couplers

Thread size Tightening torque (Nm) NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 NPT, R3/4 28 to 30 NPT, R1 36 to 38 NPT, R1 1/4 40 to 42 NPT, R1 1/2 48 to 50 (3) If the product is screwed in with excessive torque, a large amount of sealant will seep out.

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

FGG-E

Port size : Rp1/4 Port size : R3/4 OUTLET Outlet of filtered fluid Port size:R2 Fig. 1 Description of parts and functions Table 1. Description and function of parts No Description Part number Material Function Hex.

2-Color Display High Precision

. + 4 x (n pcs. 1) 36 0.3 36 0.3 4 x R3 or less 4 x R3 or less 67 or more Panel thickness 1 to 5 mm Note) This is the minimum value for the piping method 01 or N01. Take the piping material and tubing into account for design.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) Number of needle rotations 10 turns

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Nil With R3 3 RB 15 N Without (Roller specification) R5 5 RC 20 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 Controller Nil Without controller CH With controller C 5 H 7 T (Communication protocal Interface Communication plug connector I/O cable*2 /Input/Output) Symbol Type Applicable interface 5 Parallel inputNPN) Nil Without

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

SI Unit for Vacuum Manifold

DetailedDeviceStatus EventQualifier (byte 0) Event Sub index Size Content Code (byte 1-2) Value MODE TYPE SOURCE INSTANCE bit 6-7 bit 4-5 bit 3 bit 0-2 1 Device hardware failure 0x5000 2 Non volatile memory failure 0x5011 3 Valve short circuit 0x1800 4 Pressure sensor short circuit 0x1801 11b 11b 100b 5 Pressure sensor failure/disconnection 0x1802 (3) 0 0xF4 (3) (4) (Event (Device) (Error