Magnet: Built-in Magnet, Mounting: Basic, Tube Material: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 100mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Coil Scrapper

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No,

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.2 to 1.0, Specification: Built-in magnet, Port thread type: M5 × 0.8, Auto Switches: M9PW, Lead Wire

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

AIR SLIDE TABLE

16.5 16.5 16.5 16.5 16.5 16.5 24.1 18.1 18.1 25.1 25.1 31.1 50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 Solid state auto switch: D-M9M9 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Port type Size Size 30 50 63 80 100 Nil M thread M5 30 50 Rc 1/8 1/8 1/4 3/8 TF G TN NPT TT NPTF 63 80 100 Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 0.01 0.01 0.005 0.005 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

In-line Air Filter

In-line Air Filter RoHS Operating pressure range 100 kPa to 1.0 MPa (20C) Both positive pressure and vacuum pressure can be used with one unit! 5 m Filtration OUT IN 100 kPa 1.0 MPa Positive pressure e.g.)

Air Catch Sensor

200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

Process Pump

D-DN

Vacuum Ejector Series ZM

/110 VAC (50/60 Hz) Vacuum DC: 1 W (With light: 1.05 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Mass Made to Order (Refer to pages 1004 to 1006 for details.)

Multistage Ejector (N)ZL Series

[kPa] Vacuum pressure [kPa] 80 80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

AFF

Combinations such as C-FV, D-FHV, J-ST are not possible.) : Not available F H R S U T V Symbol Auto drain specifications Nil Auto drain 3 Symbol Nil Description C D J Drain cock (Without auto-drain) N.C. auto drain N.O. auto drain C D 3 Refer to Auto Drain Specifications/Option Combinations.

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Smooth Cylinder Series CQSY 12, 16, 20, 25 How to Order B 20 D 30 C CQSY M9BW B D 20 30 C CDQSY With auto switch Number of auto switches Nil S n With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Micro Mist Separator Series AFD20/30/40

IR : Combination not available : Available only with NPT thread : Combination available : Varies depending on the model Accessory/Optional Specifications Combinations VEX Applicable micro mist separator Optional specifications Accessory Symbol Combination AFD20 B C D 2 6 8 C J R Z W AFD30 to 40 AMR Accessory/Optional specifications B C D Accessory Optional specifications With bracket ITV

Mist Separator Series AFM20/30/40

(The SI unit type is provided for use in Japan.) : Combination available : Varies depending on the model : Combination not available : Available only with NPT thread Accessory/Optional Specifications Combinations Applicable mist separator Optional specifications Accessory Combination Symbol AFM20 B C D 2 6 8 C J R Z W AFM30 to 40 Accessory/Optional specifications B C D Accessory With bracket