See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142