3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Normally Closed SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

Air Cylinder NCX2 Series Slide Unit

PLC D-F7BV }F/PW D-J79W D-FIBAL D-J7SC 24VDC Relay PLC D-F/LF D-F/NF lC Circu t, Re ay, PLC D-F/NTL 'I ms or ess 14 140F o Series NCDX2 o Contact Protection Box Mounting Instructions eReed switches which have indicator lights are polarized (light emitting diodes). Brown 0ed) lead wire is (+), and Blue (black) lead wire is (-).

Digital Flow Switches Series PF2A

flow rate: l/min Accumulated flow: l, m3, m3 x 103 Port size Output specification Port size Applicable model Flow rate (l/min) 28 29 68 69 NPN open collector 1 output + Analog output (1 to 5 V) NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (4 to 20 mA) Symbol 3000 6000 12000 10 14

Air Cylinder RSQ Series Stopper Cylinder

L Bore size 440, 50i RSnOE:8:l-lL t u r,-l rNoie4rThei'our srrws ane^rended pislon rod lNo5) Lo s'loleaanq.on6lodlltl'4gsa'eprovioedorl{on trodsioe Senes RSO ' D mens ons olher rhan those sh@n n the lable ber@ are lhe sme a th drawings bdow Stroke adjusting shock absorber P s t H EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Series PF2D Flow Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.025 0.030 0.025 0.020 0.025 0.020 0.020 0.015 0.015 0.015 0.010 0.010 0.010 0.005 0.005 0.005 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min

For Water Digital Flow Switch Series PFW

without lead wire) 650g (without lead wire) 470g (without lead wire) Equivalent to IP65 3/8, 1/2 3/8 1/2, 3/4 22 For Water Digital Flow Switch Series PFW Flow Characteristics (Pressure Loss) PFW704, 504 PFW720, 520 PFW740, 540 0.030 0.05 0.07 0.025 0.06 0.04 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14

Pneumatic Positioner IP300/IP3100

Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'Z) Supply Output Flow Rate 8.8 SCFM (250 Nl/min) at 70 psi (5 kgf/cm':) Supply Ambient Temperature and Temperature of Working Air 14" 140"F (-10 60"C) Range of Angular Adjustment 0'-90'CW or 0"-90" CCW (adjustable range 0 -60 to 0q95') Port Size 1/4" (all ports) Raw lvlaterial of l\4ain Parts Aluminum Die-cast, Stainless Steel, Brass, Nitrile

Compact Electro-pneumatic Regulator Series ITV0000

SUP, VAC port (4, 5/32") OUT 3 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L bracket (optional) Flat bracket (optional) 6-3.5 19 74 2-3.5 19 27 19 64 28 Minimum bending radius 80 Body +50 0 3000 15 35 (30.9) 8.7 4 9.9 Cable connector (4-wire) Straight type (optional) 7 14 Body Cable connector (4-wire) Right angle type (optional) 8.3 4.3 10.2 Minimum bending

Air/Manually Operated High Purity Chemical Valve Series LV

Double acting Suck back Single type P P P A B A B Unit Single type Unit Air Operated Threaded Type Series LVA P.7 to P.14 LVA10 LVA20 LVA30 LVA40 LVA50 Model Orifice diameter 2 4 8 12 20 Port size Body material 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 SUS316 PPS PFA Valve type Type Symbol Basic type N.C. PA PB PA N.O. B A B A B A PB N.C. N.O.

Guide Table Series MGF

Nickel plated Clear anodized 1 Carbon steel Body Aluminum alloy Hexagon socket head cap screw B 13 Nickel plated Hard anodized 2 Tube Hexagon socket head cap screw C Carbon steel Aluminum alloy 14 Clear anodized 3 Rod cover Magnet Magnet Aluminum alloy 15 Chromated 4 Piston Plug Carbon steel Aluminum alloy 16 Electroless nickel plated 5 Piston rod Element Resin Carbon steel 17 Anodized 6

Electric Actuators

to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106 LJ1H202NC 14

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 PBT Return spring 9 Stainless steel o Board assembly 10 Casing 11 PBT r e Plug 12 NBR w O-ring 13 NBR O-ring 14 EPDM/FKM/Kalrez !4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.)

Needle Valve for Chemicals Series LVN

Series LVN Flow characteristics LVN20 LVN30 LVN40 4.5 8 14 4 7 12 3.5 6 10 MPa 3 5 Flow rate Flow rate Flow rate 8 2.5 4 0.03MPa 2 6 3 1.5 4 2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 Needle rotations Needle rotations Variations Applicable tubing outside diameter diameter Series (water) 4 6 8 10 12 1/8 3/16 1/4 3/8 1/2 4.4 0.5 LVN20 8 1.4 LVN30 10

Miniature Guide Rod Cylinder Series MGJ

steel Hard chromium electroplated Guide rod 8 Aluminum alloy Hard anodized Plate Constructional steel Nickel plated, in case of 6 Torque socket head bolt 9 Constructional steel Nickel plated, in case of 10 Hexagon socket head cap screw 10 Constructional steel Nickel plated Brazier head hexagon socket bolt 11 Resin Bumper Magnet 12 Magnet Bushing 13 Sintered oil-impregnated beaning Rod seal 14

Electric Actuator with Integrated Guide Series LTF

Page Standard stroke (mm) and Model Non-standard motor Standard motor Deflection 100 200 300 400 500 600 700 800 900 1000 36 LTF6EPH 4 to 500 to 390 40 LTF6ENH 8 to 500 to 390 44 LTF8FPL 12 to 1000 to 890 to 710 to 580 to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14

Miniature Tubing & Miniature Fittings Series TU/M

Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless steel J D I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g B C D E M A Model M-32F-2 M-04F-2 17.7 18 1 3.7 14

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Compact Vacuum Ejector Series ZQ

Note 2) Including a 0.3 m connector for the supply and release valves and a 0.6 m connector for the switch. 23 -80 kPa 14 46 Maximum vacuum pressure Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) Switch + 8 stations with suction filter 109 g x 8 + 122 g = 994 g Supply pressure range 0.3 MPa to

High Precision Digital Pressure Switch, Series ZSE40/ISE40

101.3kPa 1.000 to 1.000MPa Set pressure range 100.0 to 100.0kPa 10.0 to 101.3kPa 0.1 to 1.000MPa Lead wire length Nil L 0.6m 3m 2 High Precision Digital Pressure Switch Dimensions ZSE40(F)/ISE40 01 T1 20 30 M5 x 0.8 thread depth 5 MPa 30 20 OUT2 OUT1 SET Width across flats 12 2-M3 x 0.5 thread depth 4 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14

M-E06-4-LQ3

) LQ3 GHB 03 Tubing size symbol (Refer to Table 1.) 03 (3, 1/8"), 04 (4), 06 (6), 07 (1/4") only Table 1 Tubing Size Symbol Metric size Inch size Tubing O.D. 3 03 4 04 6 06 8 08 10 10 12 12 19 19 25 25 1/8" 03 1/4" 07 3/8" 11 1/2" 13 3/4" 19 1" 25 Symbol Note 1) GPS GB GB GPS Fitting type Note 1) Sizes with the same symbol number and 06 and 07 are common sizes. 6 c Akihabara UDX 15F, 4-14