SMC Corporation of America
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1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10

Suction Verification High Vacuum Set-value correction by auto-shift function Suction Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value P-1 Rectified value P-1 (Differential) Pressure H-1 (P-3) H-1 (H-2) n-1 Min.

Figure 7-1 MPC Product Elements Drawing N o .

By changing the port plug into a fitting, it can be used as the 5 port single solenoid valves, too. 1 2 3 1 2 3 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 0 0 0 2 2 2 2 0 0 0 0 2 2 2 2 Base Mounted VQZ 85 ,N.C./VQZ 95 ,N.O. 1 1 1 1 3 3 3 3 1 1 1 1 3 3 3 3 3 port valves have the same external appearance as the 5 port valves.

(mm) 4 6 8 10 12 3.18 4.76 6.35 9.53 12.7 2.5 4 5 6.5 8 2 3.18 4.23 6.35 8.46 Black (B) White (W) Red (R) Blue (BU) Burst Pressure Characteristics Curve Yellow (Y) Green (G) Clear (C) Orange (YR) Nominal size (inch) 5 32 " 5 16 " 1 4 3 8 " 3 16 " 1 8 " 1 2 " " Specifications Fluid Air, Water Max. operating pressure 0.8MPa at 20C Refer to pressure characteristics curve.

Description Material HAW22 HAW37 HAW55 HAW75 HAW110 Aluminum, Copper, Carbon steel 4 Flower fin tube assembly 42036 (1 pc.) 42046 (1 pc.) 42054 (1 pc.) 42062 (1 pc.) 42073 (1 pc.) 6 Seal Non-asbestos 42032#1 (2 pcs.) 42042#1 (2 pcs.) 42042#1 (2 pcs.) 42042#1 (2 pcs.) 7 Seal Non-asbestos 42035#1 (1 pc.) 42045#1 (1 pc.) 42045#1 (1 pc.) 42045#1 (1 pc.) 42072#1 (1 pc.) 8 Seal Non-asbestos 42037

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

No.2 No.1 No.4 No.3 No.6 No.5 No.8 No.7 Caution 64 16 32 4 8 1 2 1 0 0 0 0 0 1 0 After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC -20No.PF-OMN0009CN-F -21No.PF-OMN0009CN-F ,FG 1 DC() 2 N.C./(15V) 3 DC() 4 (1~5V420mA) PF3W5 M8 PF3W5--1/2 15 V/420 mA DC(+) 15 V 1 k

Product Specifications 7 3.1 Outside dimension diagram 7 (1) Screw mount type (LECP6##-#-X120) 7 (2) DIN rail mount type (LECP6##D-#-XB120) 8 3.2 How to install 8 4. CN5: Parallel l/O Connector 9 4.1 Parallel I/O signals (changed) 9 (1) When the MODE input (Terminal No. A8) is OFF 9 (2) When the MODE input (Terminal No. A8) is ON 12 4.2 Parallel I/O Wiring Example 13 5.

8 10 12 19 25 W/O nuts and bushings W/O nuts and bushings 1/8 3/16 1/4 3/8 1/2 3/4 1 Standard Size With Reducer Tubing Insertion T ools LQ-GJ Smaller Diameter Tubing How To Order LQ GJ Nil B None With bracket Type Table 1.

2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20 0 2

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

F (C) Correction factor 58.0 (0.4) 0.9 1.06 72.5 (0.5) 36 to 77 (2 to 25) 0.93 1.02 87.0 (0.6) 86 (30) 0.96 1 101.5 (0.7) 90 (32) 1 116 (0.8) 0.99 95 (35) 1.03 130.5 (0.9) 0.98 104 (40) 1.06 145 to 232 (1 to 1.6) 0.92 113 (45) 1.09 1 Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140F (60C) (Max. ambient

GR-R-010(10g) 1 2 3) , 4 7 1 100 4 3g 1cm 1 2 100mm 7. 4. g 20 25 32 40 (mm) 100st 2 3 3 34 50st 0.5 0.5 0.5 1 19 3-2-4. 1) 8 8 2(9) 9 3) , 6 1mm 8. 9. 20 3-3. 3-3-1.

5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

20 stations (Maximum) Port size M5 M5 x 0.8 C4 4 cassette Note) 1(P), 3(R) ports: Rc1/8.