IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

Series VS

/EX500-Q101-X1 EX500-Q001/EX500-Q101 EX126D-SMJ1 EX250-SEN1 S kit 1 to 12 stations (16 stations) 24 1 to 8 stations (16 stations) 16 1 to 12 stations (16 stations) 24 Note 1) The numeral in parentheses indicates the maximum number of stations in case of special wiring specification.

MU

SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS

Table of Contents

D+1 0 mm Stroke length tolerance -X 20Option Data Extension end (AS) Stroke adjustment Rubber stopper Retraction end (AT) range 0 to 5 mm Both ends (A) Extension end (BS) W/ shock absorber is not available in Series MXQ6.

ZP

-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10

Dedicated Controller

JOG JOG operation mode HOLD Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

XSA Series

Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

10

X1 300 Q F D D 300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole E C R C R E 1.2 1.2 1.2 1.2 B1 B B1 B 2 x P Port size 2 x P Port size Y W Y W DIN terminal Conduit terminal U U1 U U1 X X X1 X1 Cable 6 to 12 F Q S 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D 34 D G1/2 Q2 F (44) 31.5 32 25 E T E C R C R G1/2 S2 B B1 2 x P Port size 2 x P Port size B B1 (mm) Mounting bracket dimensions

Modular F.R.L. Unit

(This is not applicable to VHS40 and VHS50) Body size Symbol 20 30 40 50 Applicable model AC20 AC25,30 AC40 AC50, AC60Note) Note) When the valve is mounted on AC60, the flow rate may decrease depending upon the mounting position.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

0.5 MPa 10, 11, 12 1500 1000 08, 09 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 10, 11 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing outside diameter as defined by the product number. 637 AS-FS Series Construction: Elbow Type AS22l1FSl-U01-06A

Slider Type/Ball Bushing Bearing

With shock absorber (1 pc. on port side) TN TF 20, 25, 32 BS The adjusting bolt is installed even when B or BS is selected.(Except 10) Standard stroke (mm) Refer to Standard Stroke on page 1529.

ISO Standard Hydraulic Cylinder

46 33 12 198 36 77 32 58 36 66 19 30 38 31 13 1/2 69 50 18 74 115 153 80 25 to 800 10.5 M33 x 2 57 32 15 223.5 M10 x 1.25 45 96 41 75 45 74 13 41 35 42 17 1/2 77 60 17 80 133 168 100 25 to 1000 14.5 M42 x 2 58 42 15 257.5 M14 x 1.5 56 115 52 90 56 86 16 50 41 38 19 3/4 79 72 22 97 146 187 Transaxial foot: CHSDLA PJ + Stroke Y J MM S + Stroke H B 2 x RcP GB GA Air release LY D E V V LH LT X1

•

F '-1: M6 x1 M:U8xt25 y Model C 0 M G I.. G Deep type (mm) H:M5xO.8 H:t.(lXI25 "B H:MSxt y M_I F C 0 E "A G ...

VM

Application 2 port 3 port Actuator VM220-02-00 VM230-02-00 Polyacetal roller Basic Roller lever VM220-02-01 VM220-02-01S VM230-02-01 VM230-02-01S VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Hard steel roller One way roller lever VM220-02-02 VM220-02-02S VM230-02-02 VM230-02-02S Polyacetal roller Hard steel roller Straight

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

VCW

Valve model Port size VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 4.5-5 Series VCW Dimensions

ZP

-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X3-B01-B10 ZPA-X3-N01-B10 ZPA-X3-T01-B10

JIS Standard Hydraulic Cylinder

Y1 S + Stroke Y1 X1 BB Z + Stroke Width across flats G ZZ + 2 strokes (mm) Bore size (mm) Stroke range (mm) B BB GA LX P LW LT F J LH NA T SS S Z X1 C Y1 R M CD 32 25 to 800 M10 x 1.25 32 39 30 37 222 40 3/8 8 40 11 32 11 220 158 16 11 38 58 62 13 0.15 0.13 40 25 to 800 32 M10 x 1.25 33 42 36 222 46 3/8 43 8 11 32 220 11 12 158 45 11 69 65 13 50 25 to 800 M10 x 1.25 40 46 37 43 246 58 1/