KA

23 17 MS 1 4 3 8 KAH10-U02 KAH10-U03 22 18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection thread 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.

MXS

Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Y Applicable shaft types: S, Y CRA1 (mm) (mm) X Y Size Size CRQ2 50 50 24.5 to 39.5 24.5 to 39.5 28 to 45 28 to 45 63 63 MSQ X = X = X = Y = Y = Y = Y = Y = 30.5 to 53.5 30.5 to 53.5 80 80 MSZ 40 to 65 40 to 65 100 100 Symbol: A51 Symbol: A52 Shorten the long shaft. CRQ2X MSQX Shorten the long shaft.

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

Air Cylinder Series MB

M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support Brackets Available combinations Refer to below picture together.

MK

RE A B (mm) Mounting Rail mounting style Direct mounting style REC D-A7H/A80H D-A73C/A80C D-F7/F79F/J79 D-F7V/J79C D-F7BA/F7W D-J79W/F7WV D-M9 D-M9V D-F9W VD-F9W D-A79W D-A9 D-A9V D-A7/A8 D-F9BAL D-P5DWL CX Model A 28 28.5 32.5 23.5 28 28 A 28 29 33 24 28.5 28.5 B 6.5 7 6 8.5 11.5 14.5 B 7 7.5 6.5 9 12 15 A 25.5 26 30 21 25.5 25.5 B 4 4.5 3.5 6 9 13 A 19.5 24 24 B 4.5 7.5 10.5 A 31.5 22.5

Digital Flow Switch (Remote type sensor unit)

49 35 28 16.8 2.7 depth 12 PF3W511 3/4, 1 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74 31

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Speed Controller: Standard Type Series AS In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-28 2 Speed Controller: Standard Type In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Effective

For post-stoppage positioning and locking

or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure 0.49 MPa Non-lube 1000 Ambient temperature 5 to 60C Piston rod size 30 mm 0 0.5 0.4 0.3 0.2 0.1 Weight 28

Exhaust Cleaner for Clean Rooms AMP Series

socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

MXW

Auto switches are shipped together (not assembled). 150 Series MXW Air Slide Table Specifications Model MXW8 MXW16 MXW20 MXW12 MXW25 12 x 2 17 or its equivalent 16 x 2 23 or its equivalent 20 x 2 28 or its equivalent 25 x 2 35 or its equivalent ( ) ( ) ( ) ( ) 8 x 2 11 or its equivalent ( ) Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Fluid Air Action Double acting MXH Operating pressure

MXS

46 56 KA 82.5 132.5 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5 100.5 150.5 M 49 54 65 83 101 151 ZZ 56 61 72 90 108 158 Regarding the external dimensions with shock absorber, refer to the external dimensions of MXS8 symmetrically on page 8-4-17.

Stainless Steel 316 Fittings

18.7 10 14 9 12 M L H2 H2 7.6 22.2 17 15 8.5 24.3 17 16 d 9.3 28 22 21 Swivel Elbow: KFG2V Applicable tube size (mm) O.D.

NCQ2/CQ2

Series CQ2 Stroke S2 Stroke S1 B L 1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range B A 1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

LEC-OM07605CN

B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.