KB

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

！ Contact our sales office for delivery dates and prices since this is a special model. SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) SMC Corporation Absolute Controller 4-14-

How to Order: LECP7 N 1 XB3 Dimensions Screw mountingLECP7***-*-XB3 DIN rail mountingLECP7**D-*-XB3 (2 ) (4 ) (1 ) (3 ) (1) Parallel I/O type (3) Option N NPN Nil Screw mounting P PNP D DIN rail mounting (2) I/O cable length (4) Actuator part number Nil Without cable Part number except cable specifications and actuator options Example : Enter LEFS16B-100B-R1 1 1.5m 3 3m for theLECP7**-LEFS16B

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEKFS25EB Lead 6: LEKFS25EB 25 15 Lead 12: LEKFS25EA Work load: W [kg] Work load: W [kg] 20 10 15 Lead 12: LEKFS25EA 10 Lead 20: LEKFS25EH 5 Lead 20: LEKFS25EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEKFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEKFS32EB Lead 8: LEKFS32EB

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0

K35-OMX0069

Example of fail-safe circuit Fail-safe circuit (7) (9) FU port FB port FA port (6) Air (8) Manual EB Manual EA cylinder G (3) Shut off valve Shut off valve (1) (2) E-STOP valve Servo valve Servo valve Air supply port (4) R3 port (5) (10) R2 port R1 port P port Air servo cylinder circuit (Main circuit) Components No.

INFORMATION Step Motor Controller 5 types of communication protocols New New

Example: LEFS16B-100B-R1C917 1 D T 7 C Compatible actuators Electric Actuator/Rod LEY Series Electric Actuator/Guide Rod LEYG Series Electric Actuator/Slider LEF Series Electric Slide Table LES/LESH Series Electric Rotary Table LER Series Electric Actuator/Guide Rod Slider LEL Series Electric Actuator/Miniature LEPY/LEPS Series Electric Gripper LEH Series Electric Actuator/Low-Profile Slider

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

AS-FE AS321F-03-W2 R3/8 AS421F-04-W2 R1/2 Applicable tubing materials FR double layer, FR soft nylon KE Note 1) Meter-out and meter-in types can be visually differentiated by the lock nut. The lock nut on the meter-out type is zinc chromated, while the meter-in type is black zinc chromate plated. Note 2) : Brass parts are electroless nickel plated, provided as standard.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3 25.5 13 9 25 8 22.2 11.2 R1/8 13.8 35.5 30.5 15.5 14.6 12 32.4 27.4 26.6 33.9 17.2 15.5 28.7 38.5 R1/4 17 40.3 35.3 19.5 34.8 29.8 18.6 18.2 34.5 32.7 33.3 32.7 33.3 44.3 44.9 45.5 44.9 45.5 R1/4 19 48.3 43.3 18.2 24.3 42.8 37.8 21 R3

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

. + 4 x (n pcs. 1) 36 360.3 4 x R3 or less 4 x R3 or less 67 or more 739 Series ZSE80/ISE80 Dimensions Panel mount (Bottom ported) 50 40 24.2 7.5 51.2 71.1 38.6 Panel-cut dimensions 360.3 36 x n pcs. + 4 x (n pcs. 1) 360.3 36 4 x R3 or less 4 x R3 or less 740 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids F in brackets stand for the function codes.

K35-OMX0029

P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

S Couplers

/8 R3/8 R1/2 R1/2 NPT1/8 NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT3/8 NPT1/2 NPT1/2 Refer to the how to order on page 1 for the sleeve lock mechanism provided type.

155

/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1 A L1 Reference dimension of "R" thread after installation.

VBA-OM-S002

VBA2: Tightening torque: 22 to 24 Nm (R3/8) VBA4: Tightening torque: 28 to 30 Nm (R1/2) (3) Change of the booster regulator OUT port plug VBA2, 4: Tightening torque: 24 Nm (M10) booster regulator by applying the seal tape. with a monkey spanner. Booster regulator Air tank Groove O-ring (4) O-ring