Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Rc 1/8, NPT 1/8, NPT 1/4 URJ 1/4, TSJ 1/4 Port size ISG Variation Leakage 1 x 105Pam3/s 1 x 1010Pam3/s ZSM 1 to 5 V voltage output Analog output 4 to 20 mA current output For URJ1/4, TSJ1/4, refer to Glossary of Terms and Technical Information on pages 878 to 879.

Dual Rod Cylinder Series CXSJ/CXS

4 !3 y e !2 q r o !6 @0 !4 !8 @2 !5 r u !1 q !6 i t y e @2 @6 @5 @4 @8 @7 @5 @6 @3 @4 Close-up of A Close-up of A Component Parts: CXSM Component Parts: CXSL Note Material No. Description Note Material No.

JXCx-OMY0008

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 (3) 5 5m Shield Cable color Terminal No. Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 (4) 3 S Standard cable Signal name Terminal No.

JXCx-OMT0061CN

G No (2) (1) LCD (2) (1) (3) (4) (4) (5) (3) (6) (5) () (6) (7) 3m (8) (7) (8) CN4 69 - 15.7 5 4 3 2 1 LEC-CMJCC-Link MJ S T T 5 4 3 2 1 5 4 3 2 1 1 DA CC-Link A 2 DB CC-Link B 3 DG CC-Link 4 SLD CC-Link T 5 FG 70 - 16

Pin Cylinders Series CJP2/CJP

Without hose nipple Nil H4 H6 4, 6, 10, 15 Cylinder standard stroke (mm) For 4/2.5 tubing For 6/4 tubing 5, 10, 15 Refer to caution on piping on page 38.

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

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4 ( ) 4 (+) () 4-pin type Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) (Ground) 3 ( ) 3 () (+) Varistor Coil NL 1 2 Varistor Coil 3 4 5 4 ( ) 4 (+) () 5-pin type Back page 4 Series SGH Specific Product Precautions 3 Be sure to read before handling.

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Mist Separator

Note 3) "Z" in Part No. (4) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to the section [4.

Auto Switch Guide

Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8

HRX-OM-Y120

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

JXCx-OMU0026

JXC-OMU0026 4.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

encoder installation . 24 1 - 4.

CXS

CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40

MHF2

5.9 11 11 14 19 E M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 2-2.6 through (Mounting hole) 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Groove for auto switch mounting M2.5 x 0.45 4 1.3 12 26 4 15

AC Servo Motor Driver (CC-Link Type)

pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Micro Mist Separator

Note 3) "Z" in Part No. (4) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to the section [4.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74