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Inputting the TL signal before reducing the speed may cause vibration. 64 - 12.4 Operation after Pushing Operation Example: Continuing from the operation example in section "12.3 Pushing Operation", the table moves to the target position 2, which is 4 mm from the Origin position, within 0.5 seconds. i.Setting example of pulse input signals Card Motor encoder resolution: 1.25 m/pulse 2-pulse

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum pressure [kPa] -65 3.2 5.1 8.6 13 20 31 52

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) 6-3 IDU22E75E A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E R11/2 360 1258 64

N.C 3 N.O 1 2 7 6 5 4 N.O PE L N TB PLC GFCI ILS M C TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-

M5, 10-32UNF 9 23/64 It may cause damage to the product body or the fitting. R1/8, NPT1/8, G1/8 13 1/2 R1/4, NPT1/4, G1/4 17 11/16 When there is any possibility of having oscillation or rotation of the body A, have the tubing secured when using the product.

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

No.PS-OMV0003CN-G / / ISE70--L2 ISE71--L2 2 8 9 11 14 14 15 17 19 20 3 21 23 25 25 25 F0 27 F1 OUT1 29 F2 OUT2 32 F3 34 F4 35 F6 37 F10 38 F11 44 F14 Zero-cut 45 F80 46 F81 47 F90 49 F96 51 F98 52 F99 54 55 IO-Link 60 IO-Link 60 60 61 IO-Link 64 72 72 73 82 84 -1No.PS-OMV0003CN-G (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General

(Page 64) 2001 0x07D1 0 R Process data Conversion formula Intercept b F32 N 2002 0x07D2 0 R Peak value U16 0 N 2003 0x07D3 0 R Bottom value U16 0 N information Diagnostic Number of pressurizing errors U16 0 N 0 ~ 1000 2004 0X07D4 0 R 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

structure 39 Outline of setting 42 Measurement mode 43 Switch Point Setting 45 OUT1: Switch point OUT2: Pressure setting 45 Default settings of OUT1 45 Default settings of OUT2 46 Preparation before setting 47 How to use Setting 47 Function Setting 48 Function selection mode 48 Table of default settings 48 Key lock (Security code setting) 62 Maintenance 63 Forgotten the security code 64

No.PS-OMT0001CN-E // ISA3-A/B2 OUT1 OUT2 or 2 7 8 14 15 (ISA3) 15 () 17 (2 ) 17 18 21 27 27 30 35 39 42 43 45 OUT1 OUT2 45 OUT1 45 OUT2 46 47 47 48 48 48 () 62 63 64 65 66 67 -1No.PS-OMT0001CN-E 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

No.2 No.1 No.4 No.3 No.6 No.5 No.8 No.7 Caution 64 16 32 4 8 1 2 1 0 0 0 0 0 1 0 After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

No.EX-OMN0027CN-D PROFIBUS DP SI // EX600-SPRA EX600-ED 2 8 9 11 13 13 15 SI 16 16 17 17 18 LED 22 24 25 26 27 29 29 31 32 42 43 52 52 63 GSD 63 63 SIEMENS PLC S7 64 67 69 70 78 -1No.EX-OMN0027CN-D [][][] (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

Read and understand this operation manual carefully before assembling, operating or providing maintenance to the product. 1 1 0 0 1 0 0 64 Figure 4 4 FG terminal Functional Earth. 5 Display LED diagnostic display. 2. Wiring of the power supply Connect the power supply to the power supply connector (2 pcs.). The EX180 power supply structure consists of two systems.

, Compatible with series LEF , Possible to set position, speed and force (64 points) , Screw mounting or DIN rail mounting, NO SIZE RATING ", ACTUATOR, ELECTRIC ACTUATOR, 2C, "LE ACTUATOR, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability