Compact Cylinder with Lock Series CLQ

x OA depth of counterbore 4 x OB depth of counterbore K BP Unlocking port Unlocked when pressurized M 4 x N With flat washer 4 pcs.

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

VCS

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.

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2.2A (53J 8 . 1 1 1206) 2.O5 l52l '11.2\2 6 0 (66J 8 4 3 (?

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( 8 ) As-lnledace 4irt4oul3l slaw node 2 isolated conhon typ 1 t o 2 ( 4 1 A$lnle/ace SirvSoi 31 sEve rrlde 1 isolated corlra" 4Te 1 l o 4 ( 8 1 Aslnledace 4irvloul 31 sla!

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4 mv30m onv 5 lnpul code 4 only 6 Outsut code 0 only 7 OuFtn code 2 or 3 only I No pressure disply I StGighl connectors 10 4-bii input gjves 16 pressur presels 11 1O{rl parallel inpui 12 Not ava|hble wrlh preset inM lype 13 100"1 ouFut at 0% input; 0% odput al 100% input 14 lllPa dispaly units only 15 Pod size 2 (1/4")only 16 Right angle L cable not availabl 17 Not availabh with monilor oulput

2/3 Port Valve for Various

+ $ ' $ + # ' ,*# ./ 01 + + + + + + ( *# ./ 2 01 + + + $ ./ 23 ##4 #1 5 6 5 + /47 .81 + + + + + + + + + + /4; .71 + + + + 47 ./1 :# < /4 ./31 + + + + 4; .1 + / .31 + 9$ :# 9$ :# 9$ 9$ :# :# + + //4; .1 9$ :# 9$ :# 9$ :# 9$ 9$ :# :# + + //4 .;1 9$ :# 9$ :# 9$ 9$ :# :# + + .31 // / / $ $ * # $ *# ? ?

Vacuum Gripper

(Silicone ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10

Wedge Cam Operation Gripper Series MHK2

Groove position for auto switch mounting (2 positions) Adjustment needle for finger speed 13.6 3 S O 4 8 0 -0.05 4 7 7 Note) When single acting, other port is used as bleed port.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 4 x M20 x 2.5 4 x M22 x 2.5 20 (3/4B) 0 250 73 330 177 80 57 8.7 108 135 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 80 57 12.2 105 150 4 x M10 x 1.5 18 40 (1 1/2B) 50 (2B) 0 60 448 94 540 354 92 65 18.1 120 160 4 x M12 x 1.75 22 65 (2 1/2B) 25 40 504 119 615 385

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

JCRB-OM00003

Table 1 Model Solenoid valve (CV) Speed Controller Tubing CRB10 CRB15 0.05 AS-M5 4/ 2.5 6/ 4 AS-M3(Type270) CRB20 CRB30 CRB40 0.1 to 0.2 AS-M5 4/ 2.5 6/ 4 Note) The speed controllers must be used in a meter-out control. (Do not use a speed controller for slow speed.) 9 4.

LEC-OM005xx

Normal mode Parameter . 74 (4-1) Parameter group selecting screen . 74 (4-2) Parameter group . 74 (4-3) Parameter setting . 75 (4-3-1) Parameter setting screens and how to set the parameter 75 (5) Normal mode Test . 76 (5-1) Test selection screen . 76 (5-2) Test items . 76 (5-3) Test details . 76 (5-3-1) JOG/MOVE . 76 (5-3-2) Return to origin . 78 (5-3-3) Test drive . 80 (5-3-4) Force output

MLGP

4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

0.01

Rc 1/4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

CLQ

1/4 Rear cylinder port Rc 1/4 Front cylinder port 10.5 13 Approx. 41 47 M10 x 1.5 effective thread depth 15 86 20 19 50 64 22 11 1.6 Minimum lead wire bending radius 10 Dust cover (manual unlocking unit) 6.6 Auto switch D-A7, A8 4-13 Counter bore depth 9.5 Rc 1/8 unlocking port (unlocks when pressurized) 17 50 64 4-11 Flat washer 4 pcs.

VCA

/2 (15A) 4 3/4 (20A) Table (2) Bracket Assembly Part No.

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

KA

(mm) A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.