High Purity Fluoropolymer Needle Valve Series LVN 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5 43 52 88 110 124 12 18 22 24 30 36 17-5-135

VVXA21/22

IN port L Dimension Pitch Pitch Model Stations 2 3 4 5 6 7 8 9 10 Symbol L1 L2 L1 L2 100 86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21 VVXA22 A 38 49 B 20.5 [17.5] 26.5 [22.5] Model VVXA21 VVXA22 C 10.5 13 D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Mounting hole DIN terminal: D Conduit terminal: T Cable 6 to 12 Model Grommet Electrical entry Bracket Conduit Conduit terminal DIN terminal R Q 59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97)

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Vacuum Ejector with Solid State Timer

/analog output 3 rotations, PNP output T54 Rated voltage Standard supply pressure 5 24VDC 0.5MPa 0.35MPa 0.45MPa H M S Valve K Air supply valve/Vacuum release valve Thread type Nil T F Rc NPTF G How to Order Ejector Manifolds ZZMA 06 06 R Mixed mounting is possible with vacuum ejector series ZM.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

NCRBIBwserbs

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

Title not found

La2 (224)9.45 (240) 1008 (2s6) 10.71 1272) 11.34 \28) 11.97 (304) L, 0.31 (8) 0.94 (24) 1.57 (40) 2.20 (56.) 2.43 (72) 3.46 (88) 4.0s 004) 4-72 (120) c.5c (136) 5.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) s.50 \zt1) 9.13 1232) 9.76 \248) 103S \tu) 1'1.02 (280) 11.5 (296) 5 Port Solenoid Valve r{v23000 Symbol Body pond fyp NVZ320 Base mounted Type wnh subplat NVZ3140 NV23220 d L / t \ t k

Adsorption Plate

Adsorption force (Theoretical fixing force) W = P x S x K (0.15) x 0.1 W : Adsorption force (N) S : Adsorption surface area (cm2) P : Vacuum pressure (kPa) K : Aperture ratio 0.15 (15%) Do not apply a pressure or load of 0.1 MPa or more to the adsorption surface. Doing so may cause a reduction in flatness, damage, or impact marks.

Part Number Description: K TYPE CONNECTOR ASSY   Product Line: V   Product Line Description: VALVE   Family Code: 235   Family Description: VZS2000 SOL VALVE 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Part Number Description: NUT FOR BOOT CM2 J/K   Product Line: A   Product Line Description: ACTUATOR   Family Code: 425   Family Description: CM2 ROUND BODY CYLINDER   Class Code: H1   Part Code: 2   Reference Code:  K   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number

3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?

3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?

), Bracket: w/o Option, Individual Release Pressure Supply: D [With Individual Release Pressure Supply (PD) Port Type], Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type), Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)