Prevents Micro-Bubbles

PAX Metric 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type PB Basic type N.C.

MG

Refer to pages 8-19-8 to 8-19-24.

SYJ300/500/700

1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x

0.4

L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

LJ1H

25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

High Purity Chemical Valve

3/16, 1/4 LVC3m 8 6, 8, 10 1/4, 3/8 LVC4m 10 10, 12 3/8, 1/2 LVC5m 16 12, 19 1/2, 3/4 LVC6m 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

Dual Speed Controller with One-touch Fitting Series ASD

Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

Modular/F.R.L. Units Series AC

AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 26 1/16 M5 x 0.8 0 26 87 85 26 28 35 13 27.8 28 Note) 65 37.5 40 65 29.5 1/8, 1/4 1/8 2 37.5 126 123 36 41.5 60 28.5 27.8 28 64 37.5 39 64 28.5 0 37.5 1/8 1/4, 3/8 167 153 30 38 55 80 27.5 27.8 28 66 37.5 41 66 30.5 3.5 37.5 1/8 1/4, 3/8 167 153 30 38 55 80 29.5 27.8 28 74 42.5 45 74 35 3.5 42.5 1/4 220 187 38 40 72.5 110 34 1/4, 3/8, 1/2 27.8

CXWM/CXWL

8 !

New

8 N.C.

VM

8 !

EX120/121/122

8 !

2/3 Port Valve

IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

24.5 S 8 10 18 24 24 T 20 24 36 44 56 V 18 22 20 28 28 X 3.5 4 8 9 9 Y 38 47 Z 14 14 19 A 68 78 87 105.5 107 Bore size (mm) 16 20 32 40 50 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

JXCx-OMT0023

2 8.

Flow Control Equipment

10 6 8 10 12 12 10 6 8 10 Tube O.D.

Electric Slide Tables

8 @7 q @5 Shipped together @8 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 10 11 No.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D-A3m 2 (Same surface) 90 95 100 105 110 125 n (Different surfaces) 60 + 30 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 90 + 30 (n 2) n = 2, 4, 6, 8 n (Same surface) 90 + 100 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Rc (PT)1/8 Rc (PT)1/4 Rc(PT)1/4 P/R port Rc(PT)1/8 VZ R c(PT)1/8 Rc (PT)1/8 6 One-touch fitting Rc (PT)1/8 Rc (PT)1/8 A port C6 Port size C8 8 One-touch fitting VT M5 X 0.8 M5 X 0.8 X port (1) M3 X 0.8 VT Body ported SYJ7l2/SYJ7l2R Valve effective area (mm2) (Cv) (2) 10.6 (0.59) VP 1/8: 9.2 (0.51) C6: 8.8 (0.49) C8: 10 (0.56) Base mounted SYJ7l4/SYJ7l4R 10.2 (0.57) 10.2 (0.57) VG Note 1)