Series PPA PPA100/101/102 Compact Manometer 4

PPA100 for high press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light 1/100 Pressure display discrimination 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 0.01 0.01 0.1 Mini. display units 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight, Auto power

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

In-line Air Filter ZFC Series

Metric size 2 3.2 3.2 4 4 6 6 8 10 12 Inch size 1/8" 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" 3/8" 0.8 Fluid Air, Nitrogen 0.6 Operating pressure 100 kPa to 1.0 MPa (at 20C) Flow rate (Positive pressure) [L/min] *1 15 45 50 80 100 200 250 450 550 650 0.4 Flow rate (Vacuum pressure) [L/min] 2 5 7 10 10 20 30 70 80 100 0.2 Proof pressure [MPa] 1.5 (at 20C) Operating and ambient temperature range

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

p10%50 mA or lessIP650 to 50 C (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

JXCx-OMU0022

Controller JXC2 Main control power supply 24 VDC 120.3 120.3 mm mm 200 200 mm/s mm/s To USB Port To USB connector 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 or To CPWR connector USB Cable PC JXC3 -3- 3. Connection Check Connect the USB cable, and supply power to the controller.

PSxx-OMP0001E

Hysteresis is the pressure difference between ON pressure and OFF pressure Operating temp. range 0 to 60 oC (With no condensation) 2 Mor more (at 500 VDC by megameter) between live parts and case Insulation resistance High Vacuum (PS1200) High Vacuum (PS1100) High Pressure (PS1000) 1000 VAC 50/60 Hz for 1 minute between live parts and case Withstand voltage How to Order Setting Pressure ON

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

50 kPa to 0.5 MPa1.0 MPa0 to 50C?5% F.S. or less?1% F.S. or less (Connected with PF2A3 ), ?3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) Bore sizes (mm) 16 20 25 32 Piston seal: 1 pc. Rod seal: 1 pc. Gasket: 1 pc. CUX16-PS CUX20-PS M3 0.54 10% CUX25-PS M4 1.23 10% Grease pack (10g): 1 pc. CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2.

Electro-Pneumatic Positioner NIP600.NIP610

supply pressure Air consumption 1 , . . ^ 1 t ^ .

Cylinder Positioner IP200 Series

IT CP Caution Caution 1.

l

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140