Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: F (G), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: Â
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: F (G), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: Â
Vacuum Regulator Series IRV U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60
Exhaust center: SQ A31 Pressure center: SQ B31 5 (R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P
PWR P P 1 1 A A Terminating resistors It is necessary to attach bus terminating resistance to the units located at the ends of transmission line. End plate SI unit Valve manifold LED indication Safety Instructions Exchange of SI unit Remove screws from End Plate and release connection of each unit. Replace old SI unit with new one. (Tie-rod does not need to be removed.)
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Head-end flange, Custom-made Specifications: None, Material of Gasket: NBR
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Head-end flange, Custom-made Specifications: None, Material of Gasket: NBR
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Head-end flange, Custom-made Specifications: None, Material of Gasket: NBR
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Head-end flange, Custom-made Specifications: None, Material of Gasket: NBR
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: FKM
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: FKM
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: FKM
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: FKM
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: NBR
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: NBR
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: FKM
× 0.8, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Material of Gasket: FKM
+ L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 1 Refer to page 618 for L8. 2 The above figure shows the manifold with controllers connected using two L-brackets and a threaded stud kit for manifold.
+ L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 Note 1) Refer to page 3 for L8.